Acta Optica Sinica, Volume. 22, Issue 11, 1296(2002)

Experimental Study on Infrared Film of Antireflective Amorphous carbon on Silicon

[in Chinese]*, [in Chinese], [in Chinese], and [in Chinese]
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    References(6)

    [1] [1] Friedmann T A, Sullivan J P, Knapp F A et al.. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond. Appl. Phys. Lett., 1997, 71(26):3820~3822

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    [4] [4] Maharizi M, Segal O, Ben-Jacob E et al.. Physical properties of a∶DLC films and their dependence on parameters of deposition and type of substrate. Diamond and Related Materials, 1999, 8:1053~1056

    [5] [5] Komninous Ph, Nouet G, Patsalas P et al.. Crystalline structures of carbon complexes in amorphous carbon films. Diamond and Related Materials, 2000, 9:703~706

    [6] [6] Gilkes K W R, Sands H S, Batchelder D N et al.. Direct observation of sp3 bonding in tetrahedral amorphous carbon using ultraviolet Raman spectroscopy. Appl. Phys. Lett., 1997, 70(15):1980~1982

    [7] [7] Chen Z Y, Zhao J P, Yano T et al.. Observation of sp3 bonding in tetrahedral amorphous carbon using visible Raman spectroscopy. Appl. Phys., 2000, 88(5):2305~2308

    CLP Journals

    [1] He Caimei, Fu Xiuhua, Zhang Jiabin, Li Shan. Study and Fabrication of Visible and IR Dual-Band Broadband Antireflection Coating[J]. Acta Optica Sinica, 2009, 29(10): 2929

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental Study on Infrared Film of Antireflective Amorphous carbon on Silicon[J]. Acta Optica Sinica, 2002, 22(11): 1296

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    Paper Information

    Category: Thin Films

    Received: Dec. 5, 2001

    Accepted: --

    Published Online: Aug. 8, 2006

    The Author Email: (yangyimin-999@163.net)

    DOI:

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