Microstructure and Optical Properties of c-AlN/TiN/Si(100) Heterostructure

Guotao Lin; Zukang Mo; Yao Weng; Yuechun Fu; Huan He; Xiaoming Shen

doi:10.3788/AOS201939.0816003

Acta Optica Sinica, Volume. 39, Issue 8, 0816003(2019)

Microstructure and Optical Properties of c-AlN/TiN/Si(100) Heterostructure

Guotao Lin, Zukang Mo, Yao Weng, Yuechun Fu^*, Huan He, and Xiaoming Shen

School of Resources, Environment and Materials, Guangxi University, Center of Collaborative Innovation for Ecological Aluminum Industry in Guangxi, Guangxi Key Laboratory of Processing for Non-Ferrous Metallic and Featured Materials, Nanning, Guangxi 530004, China

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Guotao Lin, Zukang Mo, Yao Weng, Yuechun Fu, Huan He, Xiaoming Shen. Microstructure and Optical Properties of c-AlN/TiN/Si(100) Heterostructure[J]. Acta Optica Sinica, 2019, 39(8): 0816003

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Paper Information

Category: Materials

Received: Mar. 12, 2019

Accepted: May. 5, 2019

Published Online: Aug. 7, 2019

The Author Email:

DOI:10.3788/AOS201939.0816003

Topics

laser devices and laser physics

Lasers and Laser Optics

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Instrumentation, Measurement and Metrology