Acta Optica Sinica, Volume. 21, Issue 1, 72(2001)

A New Algorithm by Iterative Least-Squares Fitting Based on the First Order Taylor Series Expansion in Phase Shifting Interferometry

[in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(8)

    [1] [1] Creath K. Tecmporal Phase Measurement Method. Robinson D W, Reid G, eds. Interferogram Analysis: Digital Fringe Pattern Measurement. Bristal and Philadephia: IOP Ltd., 1993. 94~140

    [2] [2] Morgan C J. Least-squares estimation in phase-measurement interferometry. Opt. Lett., 1982, 7(8):368~370

    [3] [3] Wei Chunlong, Chen Mingyi, Guo Hongwei et al.. General phase-stepping algorithm using Lissajous figures technique. Proc. SPIE, 1998, 3478:411~416

    [4] [4] Wei Chunlong, Chen Mingyi, Wang Zhijiang. General phase-stepping algorithm with automatic calibration of phase steps. Opt. Engng., 1999, 38(8):1357~1360

    [5] [5] Wei Chunlong, Chen Mingyi. Compund phase-stepping algorithm by Lissajous figure technique and iterative lease-squares fitting. Proc. SPIE, 1999, 3782: 415~425

    [6] [6] Okada K, Sato A, Tsujiuchi J. Simultaneous calculation of phase distribution and scanning phase shifting interferometry. Opt. Commun., 1991, 84(3,4):118~124

    [7] [7] Kong I B, Kim S W. General algorithm of phase-shifting interferometry by iterative least-squares fitting. Opt. Engng., 1995, 34(1):183~187

    [8] [8] Kong I B, Kim S W. Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors. Opt. Engng., 1995, 34(5):1400~1404

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    [in Chinese], [in Chinese], [in Chinese]. A New Algorithm by Iterative Least-Squares Fitting Based on the First Order Taylor Series Expansion in Phase Shifting Interferometry[J]. Acta Optica Sinica, 2001, 21(1): 72

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 8, 1999

    Accepted: --

    Published Online: Aug. 10, 2006

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