Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness

PENG Song; LIU Zhi-guo; SUN Tian-xi; LI Yu-de; LIU He-he; ZHAO Wei-gang; ZHAO Guang-cui; LIN Xiao-yan; LUO Ping; PAN Qiu-li; DING Xun-liang

doi:10.3964/j.issn.1000-0593(2013)08-2223-04

Spectroscopy and Spectral Analysis, Volume. 33, Issue 8, 2223(2013)

Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness

PENG Song^1,2,3、*, LIU Zhi-guo^1,2,3, SUN Tian-xi^1,2,3, LI Yu-de^1,2,3, LIU He-he^1,2,3, ZHAO Wei-gang^1,2,3, ZHAO Guang-cui^1,2,3, LIN Xiao-yan^1,2,3, LUO Ping^1,2,3, PAN Qiu-li^1,2,3, and DING Xun-liang^1,2,3

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PENG Song, LIU Zhi-guo, SUN Tian-xi, LI Yu-de, LIU He-he, ZHAO Wei-gang, ZHAO Guang-cui, LIN Xiao-yan, LUO Ping, PAN Qiu-li, DING Xun-liang. Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness[J]. Spectroscopy and Spectral Analysis, 2013, 33(8): 2223

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Paper Information

Received: Nov. 1, 2012

Accepted: --

Published Online: Aug. 12, 2013

The Author Email: PENG Song (yks0651@sina.com)

DOI:10.3964/j.issn.1000-0593(2013)08-2223-04

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology