Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 59(2025)
Research of Transformer-Coupled Plasma Etching Molybdenum Sidewall Profile and Etch Rate
[3] [3] LI Nian, WANG Bin, QIAN Zhenghua. Suppression of spurious lateral modes and undesired coupling modes in frame-like FBARs by 2-D theory[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2020, 67(1): 180-190.
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TIAN Benlang, LIANG Liuhong, HE Chengyong, LUO Gan, GUO Yaozu, MI Jia. Research of Transformer-Coupled Plasma Etching Molybdenum Sidewall Profile and Etch Rate[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 59
Received: Aug. 31, 2024
Accepted: Apr. 17, 2025
Published Online: Apr. 17, 2025
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