Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 59(2025)

Research of Transformer-Coupled Plasma Etching Molybdenum Sidewall Profile and Etch Rate

TIAN Benlang1... LIANG Liuhong1,2, HE Chengyong1, LUO Gan1, GUO Yaozu1 and MI Jia1 |Show fewer author(s)
Author Affiliations
  • 1The 26th Institute of China Electronic Technology Group Corporation, Chongqing 400060, China
  • 2The 24th Institute of China Electronic Technology Group Corporation, Chongqing 400060, China
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    References(1)

    [3] [3] LI Nian, WANG Bin, QIAN Zhenghua. Suppression of spurious lateral modes and undesired coupling modes in frame-like FBARs by 2-D theory[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2020, 67(1): 180-190.

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    TIAN Benlang, LIANG Liuhong, HE Chengyong, LUO Gan, GUO Yaozu, MI Jia. Research of Transformer-Coupled Plasma Etching Molybdenum Sidewall Profile and Etch Rate[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 59

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    Paper Information

    Received: Aug. 31, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.009

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