Fig. 1. Structure diagram of 100 kHz PEM

Fig. 2. Composition structure diagram of PEM

Fig. 3. Steady-state simulation results of piezoelectric actuator

Fig. 4. Steady-state simulation results of elastic-optic crystal

Fig. 5. Steady-state simulation results of 100 kHz PEM

Fig. 6. Surface displacement distribution diagram in four pure standing wave modes of PEM

Fig. 7. Surface displacement distribution diagram of 100 kHz pure traveling wave PEM in one period