[1] [1] Y. J. W.Hard. Adaptive Optics for Astronomical Telescope[M]. New York: Oxford, 1998, 178～194

[2] [2] Jiang Wenhan. Modem Scientific Instrument Technology and Design[M]. Beijing:Science Press, 2003, 1049～1114

[3] [3] Zhou Renzhong. Adaptive Optics[M]. Beijing: National Defence Industry Press,1996, 1～8

[4] [4] G. Vdovin, P. M. Sarro, S. Middelhoek. Technology and application of micromachined silicon adaptive mirrors[J]. Opt. Eng., 2002, 23(3): 225～237

[5] [5] Donald Owens, Michael Schoen, Keith Bush. MEMs deformable mirror embedded wavefront sensing and control system[C]. SPIE, 2006, 6113: 1～12

[6] [6] J. A. Perrault, T. G. Bifano, B. M.Levine et al.. Adaptive optic correction using microelectromechanical deformable mirrors [J]. Opt. Eng., 2002, 41(3): 561～566

[7] [7] Nathan Doble, David R. William. The application of MEMs technology for adaptive optics in vision science[J]. IEEE, 2004, 10(3) :629～636

[8] [8] Fang Di, Chen Haiqing, Li Jun et al.. The measurement of some important parameters of MEMs deformable mirror[J]. Optical Instruments, 2005, 27(5): 21～26

[9] [9] Chen Ke, Zhao Dazun, Yu Xin. Measurement and study for optical influence function matrix of micromachined membrane deformable mirrors[J]. High Technology Letters, 2000, (9): 22～26

[10] [10] J. A. Perrault, T. G. Bifano, B. M. Levine et al.. Adaptive optic correction using microelectromechanical deformable mirror[J]. Opt. Eng., 2002, 41(3): 561～566

[11] [11] G. Vdovin. Optimization-based operation of micromachined deformable mirrors[C]. SPIE,1998, 3353: 902～909

[12] [12] H. W. Babcock. The Possibitity of Astronomical Seeing[M]. Publ. Astron. Soc. Pac., 1953, 65

[13] [13] R. B. Leightton. Concerning the problem of making sharper photographs of the planets[J]. Scientific Amer., 1956, 194: 157

[14] [14] B. Sicheistiel, W. Waters, T. Wild. Self-focusing array research model[J]. IEEE Trans. on Antennas and Propag., 1964, 12(2): 150～154

[15] [15] Li Ende, Duan Haifeng, Dai Yun et al.. Analysis of characteristics of micromachined membrane deformable mirror[J]. High Power Laser and Particle Beams, 2006, 18(7): 1099～1103