Laser & Optoelectronics Progress, Volume. 57, Issue 15, 152401(2020)
Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry
Figures & Tables(14)
Fig. 3. Variation of ellipsometric parameters of quartz crystal with incident angle. (a) Ψ; (b) Δ
Fig. 4. Variation of ellipsometric parameters of calcite crystal with incident angle. (a) Ψ; (b) Δ
Fig. 5. Variation of ellipsometric parameters of quartz crystal with optical axis azimuth angle. (a) Ψ; (b) Δ
Fig. 6. Variation of ellipsometric parameters of calcite crystal with optical axis azimuth angle. (a) Ψ; (b) Δ
Fig. 7. Relationship between standard deviation of crystal optical parameters and rotation angle. (a) quartz crystal; (b) calcite crystal
Fig. 8. Relation between the angular position error and the optical axis azimuth angle of crystal. (a) quartz crystal; (b) calcite crystal
Table 1. Inversion data of quartz crystal
View tableTable 1. Inversion data of quartz crystal
Optical parameter no ko ne ke ϕ /° No noise 1.5427±0 0±0 1.5517±0 0±0 59.998±0 Add 0.02° noise 1.5414±0.001 0.00009±0.0001 1.5511±0.0007 0.00004±0.0006 62.100±3.2
Table 2. Inversion data of calcite crystal
View tableTable 2. Inversion data of calcite crystal
Optical parameter no ko ne ke ϕ /° No noise 1.6605±0 0.02±0 1.4874±0 0.02±0 60.001±0 Add 0.02° noise 1.6606±0.002 0.02±0.0003 1.4874±0.0005 0.02±0.00007 60.040±0.2
Table 3. Repeated measurement results of ellipsometric parameters of crystalunit: (°)
View tableTable 3. Repeated measurement results of ellipsometric parameters of crystalunit: (°)
Ellipsometric parameter Initial angle Rotate 30° Rotate 60° Ψ1 Δ1 Ψ2 Δ2 Ψ3 Δ3 Quartz crystal 19.226±0.006 358.132±0.020 19.443±0.003 358.041±0.003 19.375±0.008 358.0433±0.02 Calcite crystal 18.851±0.003 359.669±0.002 16.830±0.007 0.492±0.001 18.478±0.004 359.925±0.008
Table 4. Inversion results of crystal optical parameters
View tableTable 4. Inversion results of crystal optical parameters
Optical parameter no ko ne ke ϕ /(°) Quartz crystal 1.5524±0.0001 0.027±0.0000500 1.5664±0.0002 0.026±0.000400 174.93±0.40 Calcite crystal 1.6518±0.0002 0.0009±0.000001 1.4857±0.0003 0.007±0.000009 180.45±0.02
Table 5. Quartz crystal measurement results of multiple experiments
View tableTable 5. Quartz crystal measurement results of multiple experiments
Initial angle /(°) Rotate 30°/(°) Rotate 60°/(°) no ko ne ne ϕ /(°) 30 60 90 1.5521 0.027 1.5635 0.025 143.61 90 120 150 1.5522 0.027 1.5611 0.025 206.43 120 150 180 1.5520 0.027 1.5611 0.026 240.30 180 210 240 1.5521 0.025 1.5617 0.026 289.30 240 270 300 1.5552 0.025 1.5626 0.025 358.93 300 330 360 1.5583 0.025 1.5648 0.026 57.23 Average value 1.5535 0.026 1.5629 0.025 Standard deviation 0.003 0.002 0.002 0.0005
Table 6. Calcite crystal measurement results of multiple experiments
View tableTable 6. Calcite crystal measurement results of multiple experiments
Initial angle /(°) Rotate 30°/(°) Rotate 60°/(°) no ko ne ke ϕ /(°) 30 60 90 1.6534 0.00080 1.4878 0.0068 151.25 90 120 150 1.6525 0.00200 1.4851 0.0160 210.15 120 150 180 1.6563 0.00500 1.4881 0.0085 241.03 180 210 240 1.6500 0.00000 1.4858 0.0058 301.61 210 240 270 1.6551 0.00073 1.4885 0.0059 330.87 240 270 300 1.6554 0.00040 1.4892 0.0033 360.65 Average value 1.6538 0.0015 1.4874 0.0077 Standard deviation 0.002 0.002 0.002 0.004
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Juan Wang, Lina Ji, Yun Bai, Zuohua Huang. Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry[J]. Laser & Optoelectronics Progress, 2020, 57(15): 152401
Paper Information
Category: Optics at Surfaces
Received: Oct. 23, 2019
Accepted: Nov. 26, 2019
Published Online: Aug. 4, 2020
The Author Email: Zuohua Huang (zuohuah@scnu.edu.cn)
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