Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 66(2023)

Single-Crystal LiTaO3 Composite Film Material on Si Substrate and Its Applications

DING Yuchong, HE Jie, CHEN Zheming, LONG Yong, MAO Shiping, and MA Jinyi
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    DING Yuchong, HE Jie, CHEN Zheming, LONG Yong, MAO Shiping, MA Jinyi. Single-Crystal LiTaO3 Composite Film Material on Si Substrate and Its Applications[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 66

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Jan. 11, 2023

    Accepted: --

    Published Online: Apr. 7, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.01.014

    Topics