Chinese Journal of Lasers, Volume. 45, Issue 6, 0603003(2018)

Preparation of p-Type Heavily-Doped 4H-SiC by Laser Irradiation of Solid Al Film

Liting Hu, Lingfei Ji*, Yan Wu, and Zhenyuan Lin
Author Affiliations
  • Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
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    Liting Hu, Lingfei Ji, Yan Wu, Zhenyuan Lin. Preparation of p-Type Heavily-Doped 4H-SiC by Laser Irradiation of Solid Al Film[J]. Chinese Journal of Lasers, 2018, 45(6): 0603003

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    Paper Information

    Category: materials and thin films

    Received: Oct. 31, 2017

    Accepted: --

    Published Online: Jul. 5, 2018

    The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)

    DOI:10.3788/CJL201845.0603003

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