Optical colorimetric LiTaO<sub>3</sub> wafers for high-precision lithography on frequency control of SAW devices

Ming Hui Fang; Yinong Xie; Fangqi Xue; Zhilin Wu; Jun Shi; Sheng Yu Yang; Yilin Liu; Zhihuang Liu; Hsin Chi Wang; Fajun Li; Qing Huo Liu; Jinfeng Zhu

doi:10.1364/PRJ.499795

Photonics Research, Volume. 12, Issue 2, 341(2024)

Optical colorimetric LiTaO₃ wafers for high-precision lithography on frequency control of SAW devices

Ming Hui Fang^1,2、†, Yinong Xie^1、†, Fangqi Xue¹, Zhilin Wu¹, Jun Shi², Sheng Yu Yang², Yilin Liu², Zhihuang Liu², Hsin Chi Wang², Fajun Li¹, Qing Huo Liu^1,3, and Jinfeng Zhu^1、*

Author Affiliations

¹School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China

²Quanzhou San’an Integrated Circuit Co., Ltd., Quanzhou 362300, China

³Eastern Institute of Technology, Ningbo 315200, China

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Supplementary Materials

Visualization 1 | Multimedia file of the measuring procedures

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Ming Hui Fang, Yinong Xie, Fangqi Xue, Zhilin Wu, Jun Shi, Sheng Yu Yang, Yilin Liu, Zhihuang Liu, Hsin Chi Wang, Fajun Li, Qing Huo Liu, Jinfeng Zhu, "Optical colorimetric LiTaO₃ wafers for high-precision lithography on frequency control of SAW devices," Photonics Res. 12, 341 (2024)

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Paper Information

Category: Instrumentation and Measurements

Received: Jul. 6, 2023

Accepted: Dec. 21, 2023

Published Online: Feb. 2, 2024

The Author Email: Jinfeng Zhu (nanoantenna@hotmail.com)

DOI:10.1364/PRJ.499795

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology