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Chinese Optics Letters, Volume. 6, Issue 3, 03225(2008)

Annealing effects on residual stress of HfO2/SiO2 multilayers

Yanming Shen1...2, Zhaoxia Han, Jianda Shao1, Shuying Shao1 and Hongbo He1 |Show fewer author(s)
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate University of Chinese Academy of Sciences, Beijing 1000493 School of Science, Henan University of Science and Technology, Luoyang 471003
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    [1] [1] Y. Shen, S. Shao, H. He, J. Shao, and Z. Fan, Chin. Opt. Lett. 5, S272 (2007).

    [2] [2] Y. Zhao, T. Wang, D. Zhang, J. Shao, and Z. Fan, Appl. Surf. Sci. 245, 335(2005).

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    [5] [5] S. Shao, G. Tian, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 25, 126 (2005).

    [6] [6] S. Tamuleviccius, Vacuum 51, 127 (1998).

    [7] [7] Y. Shen, H. He, S. Shao, J. Shao, and Z. Fan, High Power Laser and Particle Beams (in Chinese) 17, 1812 (2005).

    [8] [8] C. H. Hsueh, Thin Solid Films 418, 182 (2002).

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    [13] [13] S. Shao, Z. Fan, J. Shao, and H. He, Thin Solid Films 445, 59 (2003).

    CLP Journals

    [1] Ming Fang, Dafei Hu, Jianda Shao, "Evolution of stress in evaporated silicon dioxide thin films," Chin. Opt. Lett. 8, 119 (2010)

    [2] Bo Wang, Jufan Zhang, Shen Dong, "New development of atmospheric pressure plasma polishing," Chin. Opt. Lett. 7, 06537 (2009)

    [3] Ning Wang, Jianda Shao, Kui Yi, Chaoyang Wei, "Experimental study of sweep control in e-beam evaporated optical coatings," Chin. Opt. Lett. 8, 621 (2010)

    [4] Bao-Jian Liu, Wei-Bo Duan, Da-Qi Li, De-Ming Yu, Gang Chen, Tian-Hong Wang, Ding-Quan Liu. Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatings [J]. Acta Physica Sinica, 2019, 68(11): 114208-1

    [5] Jianing Dong, Jie Fan, Sida Mao, Yunping Lan, Yonggang Zou, Haizhu Wang, Jiabin Zhang, Xiaohui Ma, "Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film," Chin. Opt. Lett. 17, 113101 (2019)

    [6] Gang Dai, Yanbei Chen, Jian Lu, Zhonghua Shen, Xiaowu Ni, "Analysis of laser induced thermal mechanical relationship of HfO2/SiO2 high reflective optical thin film at 1064 nm," Chin. Opt. Lett. 7, 07601 (2009)

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    Yanming Shen, Zhaoxia Han, Jianda Shao, Shuying Shao, Hongbo He, "Annealing effects on residual stress of HfO2/SiO2 multilayers," Chin. Opt. Lett. 6, 03225 (2008)

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    Paper Information

    Received: Jul. 5, 2007

    Accepted: --

    Published Online: Mar. 27, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology