Fig. 1. Meslin interference structures. (a) Different object distance; (b) different focal length

Fig. 2. Micrograph of Meslin-split photon sieves

Fig. 3. Simulation results and phase shift versus moving distance of interference fringe. (a) Phase shift of -π; (b) phase shift of -π/2;(c) phase shift of 0; (d) phase shift of π/2; (e) phase shift of π; (f) phase shift versus moving distance of interference fringe

Fig. 4. Experimental optical path for phase calibration with Meslin-split photon sieves. (a) Schematic; (b) optical path diagram

Fig. 5. Experimental data of SLM phase calibration under 633 nm laser. (a) Interference spots; (b) local magnification of Fig. 5(a)

Fig. 6. Experimental results of SLM phase calibration under 633 nm laser. (a) Grayscale versus interference displacement; (b) grayscale versus phase shift

Fig. 7. Experimental results of SLM phase calibration under 488 nm laser. (a) Interference spots; (b) grayscale versus phase shift

Fig. 8. Experimental optical path of wavefront sensor

Fig. 9. Phase shifts corresponding to SLMs with different grayscale values under 633 nm laser incidence. (a) Grayscale value of 34; (b) grayscale value of 114; (c) grayscale value of 178; (d) grayscale value of 226

Fig. 10. Phase shifts corresponding to SLMs with different grayscale values under 488 nm laser incidence. (a) Grayscale value of 129; (b) grayscale value of 177; (c) grayscale value of 193; (d) grayscale value of 225

Fig. 11. Grayscale-phase curves verified by wavefront sensor under different wavelength incident light