Progress of Silicon Carbide Integrated Photonics

Chengli Wang; Jiachen Cai; Liping Zhou; Ailun Yi; Bingcheng Yang; Yuanhao Qin; Jiaxiang Zhang; Xin Ou

doi:10.3788/AOS230960

Acta Optica Sinica, Volume. 43, Issue 16, 1623017(2023)

Progress of Silicon Carbide Integrated Photonics

Chengli Wang^1,2, Jiachen Cai^1,2, Liping Zhou^1,2, Ailun Yi¹, Bingcheng Yang^1,2, Yuanhao Qin^1,2, Jiaxiang Zhang^1,2、**, and Xin Ou^1,2、*

Author Affiliations

¹National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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Chengli Wang, Jiachen Cai, Liping Zhou, Ailun Yi, Bingcheng Yang, Yuanhao Qin, Jiaxiang Zhang, Xin Ou. Progress of Silicon Carbide Integrated Photonics[J]. Acta Optica Sinica, 2023, 43(16): 1623017

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Paper Information

Category: Optical Devices

Received: May. 10, 2023

Accepted: Jun. 27, 2023

Published Online: Aug. 1, 2023

The Author Email: Zhang Jiaxiang (jiaxiang.zhang@mail.sim.ac.cn), Ou Xin (ouxin@mail.sim.ac.cn)

DOI:10.3788/AOS230960

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology