Optical Instruments, Volume. 45, Issue 3, 47(2023)
Optimization of XUV optical system by real-coded genetic algorithm based on wave aberration theory
Figures & Tables(14)
Fig. 1. Schematic diagram of imaging of plane-symmetric optical system
Fig. 2. Schematic diagram of the optical path of adjacent optical elements in the sagittal plane of a multi-element optical system
Fig. 6. Imaging spot diagram of XUV monochromator （A1, A2, A3, A4 are the spot diagrams obtained by using the program based on wave aberration theory according to the optimized values in this paper, B1, B2, B3, B4 are the simulation results in Shadow based on the optimized values in this paper, C1, C2, C3, C4 are the simulation results in Shadow based on the data in the reference）
Fig. 8. Ray tracing results （A1, A2, A3 are ray tracing spot diagrams obtained by using the results of reference [15], and B1, B2, B3 are ray tracing spot diagrams obtained by using the optimization values in this paper）
Table 1. System parameters of XUV monochromator device
View tableView in ArticleTable 1. System parameters of XUV monochromator device
衍射级次 $m$ 物距 ${r_0}/{\rm{mm}}$ 像距 ${r'_0}/{\rm{mm}}$ 光栅半径 $R/{\rm{mm}}$ 刻槽密度 $f/{ {\rm{mm} }^{ - 1} }$ −1 409.607 410.959 500 600 物方弧矢焦距 ${r_{\rm{s} } }/{\rm{mm} }$ 物方子午焦距 ${r_{\rm{m}}}/{\rm{mm}}$ 光栅刻划面积/（mm × mm） 全息记录波长 ${\lambda _0}/{\rm{nm} }$ 500 500 $50 \times 30 $ 457.9
Table 2. Optimization results of parameters
View tableView in ArticleTable 2. Optimization results of parameters
优化参量 ${r}_{d}/{\rm{mm}}$ ${r_c}/{\rm{mm}}$ $\delta /( ^\circ )$ Q值 变量搜索区间 0~600 0~600 −46~14 参考文献结果 479.419 330.630 −41.677 15.595 本文优化结果 482.093 328.732 −40.907 15.592
Table 3. Solving the corresponding angle parameters of light sources with different wavelengths needed in the simulation software
View tableView in ArticleTable 3. Solving the corresponding angle parameters of light sources with different wavelengths needed in the simulation software
波长/ nm 入射角 α/(◦) 衍射角 β/(◦) 光源弧矢发散角 θv/rad 光源子午发散角 θh/rad 200 30.673 −39.060 0.0732 0.1051 250 29.622 −40.111 0.0732 0.1061 400 26.457 −43.276 0.0732 0.0969 600 22.194 −47.539 0.0732 0.1130
Table 4. System parameters of XUV spectrometer
View tableView in ArticleTable 4. System parameters of XUV spectrometer
$\alpha /(^\circ )$ $\theta /(^\circ )$ ${r_0}/{\rm{mm}}$ ${r'_0}/{\rm{mm }}$ ${r'_{{\rm{m}}1} }/{\rm{mm} }$ ${r_{{\rm{m}}2} }/{\rm{mm} }$ ${R_1}/{\rm{mm}}$ −88 −86 358.39 1000 180 34.9 3430.98 前置镜面积/（mm×mm） 优化波长 $\lambda /{\rm{nm} }$ 后置光栅衍射角 $\beta /(^\circ )$ 记录波长 ${\lambda _0}/{\rm{nm }}$ 衍射级次 12.9 × 1.8 3，4.4，6 86.022 1，85.380 0，84.741 2 457.93 −1 狭缝宽 ${S_{\rm{w}}}/{\rm{mm}}$ 刻槽密度 $f/{{\rm{mm}}^{ - 1} }$ 光源子午发散角 ${\theta _h}/{\rm{rad}}$ 光源弧矢发散角 ${\theta _v}/{\rm{rad}}$ 光源场角 $U/{\rm{rad}}$ 0.01 600 0.0050 0.0025 0.0022
Table 5. Optimization results
View tableView in ArticleTable 5. Optimization results
优化参量 ${\rho }_{1}/{\rm{mm}}$ ${R}_{2}/{\rm{mm } }$ ${\rho }_{2}/{\rm{mm}}$ ${r}_{c}/{\rm{mm}}$ ${r}_{d}/{\rm{mm}}$ $\delta /(^ \circ )$ 搜索区间 10~137 500~8691 10~4105 0~150000 0~150000 −46~90 参考文献值 42.74 2057.29 235.07 70.38 62.17 9.905 本文优化值 53.10 2345.07 82.02 60280.02 52.56 81.042
Table 6. Comparison of FWHM values in horizontal and vertical directions
View tableView in ArticleTable 6. Comparison of FWHM values in horizontal and vertical directions
数据来源 3 nm 4.4 nm 6 nm $ F\_X $ $ F\_Y $ $ F\_X $ $ F\_Y $ $ F\_X $ $ F\_Y $ 参考文献 70.7436 7.7899 49.5754 7.7912 41.8226 5.6821 本文 16.0606 68.1836 9.0490 1.7933 6.9501 69.3618
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Tao ZENG, Lijun LYU. Optimization of XUV optical system by real-coded genetic algorithm based on wave aberration theory[J]. Optical Instruments, 2023, 45(3): 47
Paper Information
Category: OPTICAL SYSTEM
Received: Nov. 2, 2022
Accepted: --
Published Online: Jul. 25, 2023
The Author Email: Lijun LYU (lulijun@shu.edu.cn)
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