Waveguide Width Optimization of On-Chip Optical Amplifier Based on 400 nm Silicon Nitride Platform

Mingzhe Chen; Wenbing Jiang; Jia Du; Boyu Zhang; Weibiao Chen; Libing Zhou

doi:10.3788/AOS240450

Acta Optica Sinica, Volume. 44, Issue 11, 1113001(2024)

Waveguide Width Optimization of On-Chip Optical Amplifier Based on 400 nm Silicon Nitride Platform

Mingzhe Chen^1,2, Wenbing Jiang², Jia Du², Boyu Zhang^1,2, Weibiao Chen^2,3、*, and Libing Zhou^2,3、**

¹Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, Anhui , China

²Department of Space Laser Technology and System, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(8)

Fig. 1. Cross-section of silicon nitride waveguide

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$Relationship between waveguide width and effective refractive indexs of propagating modes in silicon nitride waveguides. (a) 1550 nm signal light; (b) 980 nm pump light$

Fig. 2. Relationship between waveguide width and effective refractive indexs of propagating modes in silicon nitride waveguides. (a) 1550 nm signal light; (b) 980 nm pump light

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Fig. 3. Normalized light intensity distribution of different modes at different wavelengths in silicon nitride waveguide with ridge width of 0.8 μm. (a) Fundamental mode $E_{00, x}^{}$ of 1550 nm signal light; (b) fundamental mode $E_{00, x}^{}$ of 980 nm pump light; (c) first order mode $E_{10, x}^{}$ of 980 nm pump light

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Fig. 4. Double layer edge coupler of 980 nm pump light

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Fig. 5. Amplifier gain coefficients corresponding to different waveguide widths

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Fig. 6. Spiral erbium-doped silicon nitride waveguide. (a) Optical mode field coupling diagram of two parallel silicon nitride waveguides with narrow distance; (b) relationship between coupling distance and transmittance under different distances between waveguides; (c) relationship between length of optical amplifier and gain coefficientat different waveguide widths

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Table 1. Coupling efficiency and mode power coefficient of edge coupler corresponding to waveguide of different widths
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Table 1. Coupling efficiency and mode power coefficient of edge coupler corresponding to waveguide of different widths
Width of waveguide
$b$ /μm
Coupling efficiency $η$ First ordermode powercoefficient $a_{0}$ Second order mode power coefficient $a_{1}$
0.5 0.823 0.9930 0.0070
0.6 0.822 0.9840 0.0160
0.7 0.823 0.9989 0.0011
0.8 0.823 0.9999 0.0001

Table 2. Overlap factor calculated for different waveguide widths
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Table 2. Overlap factor calculated for different waveguide widths
Width of waveguide /μm Signal light overlap factor $Γ_{s}^{'}$ Pump light overlap factor $Γ_{p}$
0.5 0.5600 0.8311
0.6 0.6132 0.8523
0.7 0.6494 0.8695
0.8 0.6756 0.8789

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Mingzhe Chen, Wenbing Jiang, Jia Du, Boyu Zhang, Weibiao Chen, Libing Zhou. Waveguide Width Optimization of On-Chip Optical Amplifier Based on 400 nm Silicon Nitride Platform[J]. Acta Optica Sinica, 2024, 44(11): 1113001

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