[1] [1] H. Bosse, G. Wilkening. Developments at PTB in nanometrology for support of the semiconductor industry [J]. Meas. Sci. & Technol., 2005, 16(11): 2155～2166

[2] [2] H.Martinussen, A. Aksnes, H. E. Tngan. Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry [J]. Opt. Express, 2007, 15(18): 11370～11384

[3] [3] L. Chassagne, M. Wakim, S. Xu et al.. A 2D nano-positioning system with sub-nanometric repeatability over the millimeter displacement range [J]. Meas. Sci. & Technol., 2007, 18(11): 3267～3272

[4] [4] Cheng Xiaohui, Zhao Yang, Li Dacheng. Review on optical nanometrology [J]. Optical Technique, 1999, 33(3): 73～77

[5] [5] Hu Xianfeng. Attenuation of self-mixing interference signal of laser diode with external-cavity length [J]. Acta Optica Sinica, 2012, 32(5): 0514002

[6] [6] G. Giuliani, M. Norgia, S. Donati et al.. Laser diode self-mixing technique for sensing applications [J]. J. Opt. A: Pure Appl. Opt., 2002, 4(6): S283～S294

[7] [7] Wang Ming, Nie Shouping, Li Dacheng. Optical feedback interferometry of semiconductor laser for sensing application [J]. Chinese J. Lasers, 2002, A29(12): 1122～1126

[8] [8] Lu Min, Wang Ming,Hao Hui. Measurement of flow velocity using self-mixing speckle interference generated in laser diode [J]. Acta Optica Sinica, 2005, 25(2): 190～194

[9] [9] Lü Liang, Huang Yang, Yu Benli. Cantilever vibration characteristics based on laser self-mixing interference effect [J]. Chinese J. Lasers, 2012, 39(2): 0208008

[10] [10] Chen Shijia, Han Daofu, Ma Li. Autocorrelation-based velocity measurement of self-mixing speckle in fiber ring laser [J]. Laser & Optoelectronics Progress, 2011, 48(3): 030601

[11] [11] Ma Junshan, Sun Xiaoming, Yu Yanguang. Summarization of measurement technique based on self-mixing interference effect in laser [J]. J. Astronautic Metrology and Measurement, 1997, 17(6): 1～7

[12] [12] Zhang Shulian. Laser feedback technique and progress [J]. Laser & Optoelectronics Progress, 2007, 44(11): 65～71

[13] [13] Wang Ming, Nie Shouping, Li Dacheng. Self-mixing interferometry of dual external cavities and its signal analysis [J]. Acta Optica Sinica, 2003, 23(6): 729～733

[14] [14] U. Zabit, O. D. Bernal, T. Bosch et al.. MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation [J]. Opt. Lett., 2011, 36(5): 612～614

[15] [15] P.Groot. Design of error-compensating algorithms for sinusoidal phase shifting interferometry [J]. Appl. Opt., 2009, 48(35): 6788～6796

[16] [16] D.Guo, M. Wang, S. Tan. Self-mixing interferometer based on sinusoidal phase modulating technique [J]. Opt. Express, 2005, 13(5): 1537～1543

[17] [17] O. Sasaki, H. Okazaki. Sinusoidal phase modulating interferometry for surface profile measurement [J]. Appl. Opt., 1986, 25(18): 3137～3140

[18] [18] Guo Dongmei, Tan Suqing, Wang Ming. Analysis of micro-displacement measurement accuracy in self-mixing interferometer based on sinusoidal phase modulating technique [J]. Acta Optica Sinica, 2006, 26(6): 845～850