Infrared Technology, Volume. 43, Issue 2, 104(2021)
Micro-coolers Based on MEMS Technology
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TONG Xin, CHEN Xiaoping, LI Jiapeng, XIA Ming, HUAI Yang, CHEN Junyuan. Micro-coolers Based on MEMS Technology[J]. Infrared Technology, 2021, 43(2): 104
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Received: Feb. 25, 2020
Accepted: --
Published Online: Aug. 23, 2021
The Author Email: Xin TONG (291740057@qq.com)
CSTR:32186.14.
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