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Opto-Electronic Engineering, Volume. 44, Issue 8, 845(2017)

High-precision measurement of low reflectivity specular object based on phase measuring deflectometry

Yuxiang Wu, Huimin Yue, and Yong Liu
Author Affiliations
  • State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
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    Yuxiang Wu, Huimin Yue, Yong Liu. High-precision measurement of low reflectivity specular object based on phase measuring deflectometry[J]. Opto-Electronic Engineering, 2017, 44(8): 845

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Dec. 1, 2017

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology