Opto-Electronic Engineering, Volume. 38, Issue 12, 85(2011)
A Method to Polish Glassceramic Components with Complex Internal Structure
References(4)
[4] [4] STILLMANA J, JUDY J, HELVJIAN H. Aspect Ratios, Size, and Etch Rate in Photo structurable Glass-ceramic [J]. Proc. of SPIE(S0277-786X), 2008, 6882: 68820J-1-68820J-11.
[5] [5] MCCREEDY T. Rapid Prototyping of glass and PDMS micro-structures for micro total an alytical systems and micro-chemical reactors by microfabrication in the general Iabo-ratory [J]. Analytica Chemica Acta, 2001, 427: 39-43.
[9] [9] LIVINGSTON F E, ADAMS P M, HELVJIAN H. Examination of The Laser-induced Variations in The Chemical Etch Rate of a Photosensitive Glass-ceramic [J]. Applied Physics A: Materials Science & Processing(S0947-8396), 2007, 89: 97-107.
[10] [10] STILLMAN J A, JUDY J W, HELVJIAN H. Processing Parameters for The Development of Glass-ceramic MEMS [J]. Proc. of SPIE(S0277-786X), 2007, 6462: 64620A-1-64620A-09.
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JIAO Ling-yan, LIU Jie, HUI Chang-shun, JIN Yu-zhu, DING Xiang-dong. A Method to Polish Glassceramic Components with Complex Internal Structure[J]. Opto-Electronic Engineering, 2011, 38(12): 85
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Received: Sep. 20, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Ling-yan JIAO (jiaolingyan7928@126.com)
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