Journal of Synthetic Crystals, Volume. 54, Issue 6, 949(2025)
Power Consumption and Heat Transfer Paths in Czochralski Silicon Crystal Growth under the Influence of Heat Shield
Figures & Tables(11)
Fig. 3. Influence of heat shield emissivity on power consumption distribution in the CZ furnace
Fig. 5. Influence of heat shield emissivity on radiative heat transfer paths
Fig. 7. Influence of heat shield emissivity on convective heat transfer paths
Fig. 8. Influence of cold side emissivity of heat shield on its temperature field
Fig. 10. Influence of heat shield emissivity on conduction heat transfer paths
Table 1.
Thermal property parameters View tableView in ArticleTable 1.
Thermal property parameters Material Density/ （kg·m-3） Heat capacity/ （J·kg-1·K-1） Thermal conductivity/（W·m-1·K-1） Emissivity Latent heat/ （J·kg-1） Viscosity/（Pa·s） Melt 2 530 1 000 64 0.30 1 810 000 8×10-4 Argon gas — 520.64 0.01+2.5×10-5T — — 8.466×10-6 +5.365×10-8T-8.68×10-12T2 Crystal 2 330 1 059 22 0.90-2.62×10-4T — — Graphite 2 300 2 019 90 0.80 — — Quartz 2 650 1 232 4 0.85 — — Carbon felt 2 101 -317+4.03T-2.4×10-4T2+ 5.0×10-7T3 0.334-1.83×10-4T+2.15×10-7T2-1.89×10-11T3-2.08×10-11T4 0.45 — — Steel 7 900 477 15 0.6 — —
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Chao QI, Dengnian LI, Zaoyang LI, Yao YANG, Zeqi ZHONG, Lijun LIU. Power Consumption and Heat Transfer Paths in Czochralski Silicon Crystal Growth under the Influence of Heat Shield[J]. Journal of Synthetic Crystals, 2025, 54(6): 949
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Received: Dec. 20, 2024
Accepted: --
Published Online: Jul. 8, 2025
The Author Email: Zaoyang LI (lizaoyang@mail.xjtu.edu.cn), Lijun LIU (ljliu@mail.xjtu.edu.cn)
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