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Spectroscopy and Spectral Analysis, Volume. 39, Issue 4, 1242(2019)

Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma

SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, and ZHANG Wen-yuan
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    SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, ZHANG Wen-yuan. Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma[J]. Spectroscopy and Spectral Analysis, 2019, 39(4): 1242

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    Paper Information

    Received: Apr. 15, 2018

    Accepted: --

    Published Online: Apr. 11, 2019

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2019)04-1242-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology