Fig. 1. Schematic diagram of X-ray wavefront sensing. (a) Schematic diagram of grating interferometer under parallel light illumination; (b) schematic diagram of grating interferometer under conical beam illumination

Fig. 2. Schematic diagram of wavefront reconstruction. (a) Schematic diagram of mirror deflection; (b) distorted Moiré fringes caused by wavefront distortion; (c) schematic diagram of phase stepping

Fig. 3. Three-dimensional design drawing of microfocus X-ray grating interferometer

Fig. 4. Experimental setup of X-ray grating interferometer

Fig. 5. Recorded fringe by detector in Moiré mode. (a) Original image; (b) filtered image

Fig. 6. Experimental results. (a) Repeatability of five measurements by Fourier analysis technique; (b) repeatability of five measurements by phase stepping; (c) residual slope under three measurement methods; (d) residual height of mirror under three measurement methods