[1] Röntgen W C. On a new kind of rays[J]. Science, 3, 227-231(1896).

[2] Miao J W, Chapman H N, Kirz J et al. Taking X-ray diffraction to the limit: macromolecular structures from femtosecond X-ray pulses and diffraction microscopy of cells with synchrotron radiation[J]. Annual Review of Biophysics and Biomolecular Structure, 33, 157-176(2004).

[3] Tao F, Zhang L, Su B et al. Design, development and commissioning of 3D nano image beamline at Shanghai synchrotron radiation facility[J]. Acta Optica Sinica, 42, 2334001(2022).

[4] Yang H R, Tan Z J, Yu H et al. X-ray intensity correlation defect detection using a single speckle pattern[J]. Acta Optica Sinica, 43, 1034001(2023).

[5] Li Z Y, Wang C, Li Q L et al. Prediction model of aluminized layer thickness based on X-ray fluorescence and extreme gradient boosting[J]. Laser & Optoelectronics Progress, 59, 2134001(2022).

[6] Lee J W, Park W B, Lee J H et al. A deep-learning technique for phase identification in multiphase inorganic compounds using synthetic XRD powder patterns[J]. Nature Communications, 11, 86(2020).

[7] Guo Q, Jiang H, Yang J J et al. Visual inspection of food packaging paper by X-ray fluorescence spectroscopy combined with deep learning algorithm[J]. Laser & Optoelectronics Progress, 59, 0434001(2022).

[8] Song H S, Chen Z, Xu D C et al. Prediction of Cr, Mn, and Ni in medium and low alloy steels by GA-BP neural network combined with EDXRF technology[J]. Laser & Optoelectronics Progress, 59, 1234001(2022).

[9] Cheng S, Yang H G, Xu X Q et al. Improved lightweight X-ray aluminum alloy weld defects detection algorithm based on YOLOv5[J]. Chinese Journal of Lasers, 49, 2104005(2022).

[10] Guinier A. La diffraction des rayons X aux très petits angles: application à l'étude de phénomènes ultramicroscopiques[J]. Annales De Physique, 11, 161-237(1939).

[11] Debye P, Bueche A M. Scattering by an inhomogeneous solid[J]. Journal of Applied Physics, 20, 518-525(1949).

[12] Porod G. Die röntgenkleinwinkelstreuung von dichtgepackten kolloiden systemen[J]. Kolloid-Zeitschrift, 124, 83-114(1951).

[13] Hosemann R. Die parakristalline feinstruktur natürlicher und synthetischer eiweisse. Visuelles Näherungsverfahren zur bestimmung der schwankungstensoren von gitterzellen[J]. Acta Crystallographica, 4, 520-530(1951).

[14] Wilkins M H, Blaurock A E, Engelman D M. Bilayer structure in membranes[J]. Nature: New Biology, 230, 72-76(1971).

[15] Engelman D M. Lipid bilayer structure in the membrane of Mycoplasma laidlawii[J]. Journal of Molecular Biology, 58, 153-165(1971).

[16] Perret R, Ruland W. Single and multiple X-ray small-angle scattering of carbon fibres[J]. Journal of Applied Crystallography, 2, 209-218(1969).

[17] Fleury B, Cortes-Huerto R, Taché O et al. Gold nanoparticle internal structure and symmetry probed by unified small-angle X-ray scattering and X-ray diffraction coupled with molecular dynamics analysis[J]. Nano Letters, 15, 6088-6094(2015).

[18] Wu W L, Lin E K, Lin Q H et al. Small angle neutron scattering measurements of nanoscale lithographic features[J]. Journal of Applied Physics, 88, 7298-7303(2000).

[19] Chen X G, Wang C, Yang T J et al. Inline optical measurement and inspection for IC manufacturing: state-of-the-art, challenges, and perspectives[J]. Laser & Optoelectronics Progress, 59, 0922025(2022).

[20] Wormington M, Ginsburg A, Reichental I et al. X-ray critical dimension metrology solution for high aspect ratio semiconductor structures[J]. Proceedings of SPIE, 11611, 116110W(2021).

[21] Wu W L, Joseph Kline R, Jones R L et al. Review of the key milestones in the development of critical dimension small angle X-ray scattering at National Institute of Standards and Technology[J]. Journal of Micro/Nanopatterning, Materials, and Metrology, 22, 031206(2023).

[22] Kline R J, Sunday D F, Windover D et al. X-ray scattering critical dimensional metrology using a compact X-ray source for next generation semiconductor devices[J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 16, 014001(2017).

[23] Shanks T, Georgantopoulos I, Stewart G C et al. The origin of the cosmic X-ray background[J]. Nature, 353, 315-320(1991).

[24] Shaw R A, Horne K. Noise model-based cosmic ray rejection for WF/PC patterns[EB/OL]. https:∥www.aspbooks.org/publications/25/311.pdf

[25] van Dokkum P. Cosmic-ray rejection by Laplacian edge detection[J]. Publications of the Astronomical Society of the Pacific, 113, 1420-1427(2001).

[26] Shamir L. A fuzzy logic-based algorithm for cosmic-ray hit rejection from single images[J]. Astronomische Nachrichten, 326, 428-431(2005).

[27] Gin P, Wormington M, Amasay Y et al. Inline metrology of high aspect ratio hole tilt and center line shift using small-angle X-ray scattering[J]. Journal of Micro/Nanopatterning, Materials, and Metrology, 22, 031205(2023).

[28] Ito Y, Goto T, Suenaga R et al. Characterization of deep-hole structure of semiconductor devices using transmission small-angle X-ray scattering[J]. Japanese Journal of Applied Physics, 62, 046501(2023).

[29] Als-Nielsen J, McMorrow D[M]. Elements of modern X-ray physics(2011).

[30] Li Z J, Zhang J, Li M J et al. Research advances on X-ray pixel detectors[J]. Chinese Science Bulletin, 67, 3808-3822(2022).

[31] Kittel C[M]. Introduction to solid state physics(2018).

[32] Bonaque-González S. Cosmic-rays-generator[EB/OL]. https:∥www.researchgate.net/publication/327155865_Cosmic-Rays-Generator

[33] Tharwat A. Classification assessment methods[J]. Applied Computing and Informatics, 17, 168-192(2021).

[34] Horé A, Ziou D. Image quality metrics: PSNR vs. SSIM[C], 2366-2369(2010).