Design of High-Throughput μ-EDXRF

Ming-bo LIU; Lei ZHAO; Xue-qiang HU; Zi-yue NI; Li-xia YANG; Yun-hai JIA; Hai-zhou WANG

doi:10.3964/j.issn.1000-0593(2022)09-2752-05

Spectroscopy and Spectral Analysis, Volume. 42, Issue 9, 2752(2022)

Design of High-Throughput μ-EDXRF

Ming-bo LIU^1、*, Lei ZHAO^{1、1; 2;}, Xue-qiang HU^2、2;, Zi-yue NI^{1、1; 2;}, Li-xia YANG^{1、1; 2;}, Yun-hai JIA^{1、1; 2;}, and Hai-zhou WANG^{1、1; 2; *;}

Author Affiliations

¹1. Central Iron and Steel Research Institute, Beijing 100081, China

²2. NCS Testing Technology Co., Ltd., Beijing 100081, China

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Figures & Tables(11)

Fig. 1. (a) Layout of NX-mapping; (b) Prototype of NX-mapping

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Fig. 2. Layout of knife-edge experiment

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Fig. 3. Mapping of Fe and Ni in X-Z knife-edge scanning of Fe-Ni film

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Fig. 4. Calculation of effective focalspot size of Fe by knife-edge experiment

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Fig. 5. Trend of effective focalspot size of Fe and Ni with sample height

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Fig. 6. Mapping of Ni/Ta/W/Re intensity in a single crystal supper alloy

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Table 1. Static test of 400 times with one detector of 25 mm², 40 kV/600 μA/0.5 s(T)
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Table 1. Static test of 400 times with one detector of 25 mm², 40 kV/600 μA/0.5 s(T)
特征线/cps 平均值(I) 实测RSD/% 理论RSD/%
Ti∶Ka 1 7567.2 1.05 1.07
Fe∶Ka 71.7 16.41 16.70
Co∶Ka 40.7 24.09 22.18
Ni∶Ka 55.1 19.88 19.05
Cu∶Ka 37.9 25.35 22.97

Table 2. Static test of 400 times with 3 detector of 25 mm² each, 40 kV/600 μA/0.5 s(T)
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Table 2. Static test of 400 times with 3 detector of 25 mm² each, 40 kV/600 μA/0.5 s(T)
特征线/cps 平均值(I) 实测RSD/% 理论RSD/%
Ti∶Ka 5 3513.8 0.63 0.61
Fe∶Ka 223.8 10.16 9.45
Co∶Ka 123.9 14.73 12.65
Ni∶Ka 163.3 12.93 11.07
Cu∶Ka 113.2 14.77 13.29

Table 3. Static test of 400 times with 6 detectors (4×25 mm²+2×50 mm²), 40 kV/600 μA/0.5 s(T)
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Table 3. Static test of 400 times with 6 detectors (4×25 mm²+2×50 mm²), 40 kV/600 μA/0.5 s(T)
特征线/cps 平均值(I) 实测RSD/% 理论RSD/%
Ti∶Ka 134 535.1 0.37 0.39
Fe∶Ka 538.5 7.07 6.09
Co∶Ka 295.2 10.97 8.23
Ni∶Ka 362.7 9.61 7.43
Cu∶Ka 240.5 12.51 9.12

Table 4. Static still test of 400 times, 5 ms(T) each
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Table 4. Static still test of 400 times, 5 ms(T) each
特征线/cps 平均值(I) 实测RSD/% 理论RSD/%
Cr∶Ka 74 193.2 5.06 5.19
Fe∶Ka 181 819.0 3.06 3.32
Ni∶Ka 11 230.0 13.30 13.34

Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s^-1
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Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s^-1
特征线/cps 平均值(I) 实测RSD/% 理论RSD/%
Cr∶Ka 74 482.4 5.04 5.18
Fe∶Ka 182 682.3 3.08 3.31
Ni∶Ka 11 257.8 13.23 13.33

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Ming-bo LIU, Lei ZHAO, Xue-qiang HU, Zi-yue NI, Li-xia YANG, Yun-hai JIA, Hai-zhou WANG. Design of High-Throughput μ-EDXRF[J]. Spectroscopy and Spectral Analysis, 2022, 42(9): 2752

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Paper Information

Category: Research Articles

Received: Jul. 23, 2021

Accepted: Oct. 26, 2021

Published Online: Nov. 17, 2022

The Author Email: Ming-bo LIU (liumingbo@ncschina.com)

DOI:10.3964/j.issn.1000-0593(2022)09-2752-05

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Static test of 400 times with one detector of 25 mm2, 40 kV/600 μA/0.5 s(T)

Table 1. Static test of 400 times with one detector of 25 mm2, 40 kV/600 μA/0.5 s(T)

Table 2. Static test of 400 times with 3 detector of 25 mm2 each, 40 kV/600 μA/0.5 s(T)

Table 2. Static test of 400 times with 3 detector of 25 mm2 each, 40 kV/600 μA/0.5 s(T)

Table 3. Static test of 400 times with 6 detectors (4×25 mm2+2×50 mm2), 40 kV/600 μA/0.5 s(T)

Table 3. Static test of 400 times with 6 detectors (4×25 mm2+2×50 mm2), 40 kV/600 μA/0.5 s(T)

Table 4. Static still test of 400 times, 5 ms(T) each

Table 4. Static still test of 400 times, 5 ms(T) each

Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s-1

Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s-1

Table 1. Static test of 400 times with one detector of 25 mm², 40 kV/600 μA/0.5 s(T)

Table 1. Static test of 400 times with one detector of 25 mm², 40 kV/600 μA/0.5 s(T)

Table 2. Static test of 400 times with 3 detector of 25 mm² each, 40 kV/600 μA/0.5 s(T)

Table 2. Static test of 400 times with 3 detector of 25 mm² each, 40 kV/600 μA/0.5 s(T)

Table 3. Static test of 400 times with 6 detectors (4×25 mm²+2×50 mm²), 40 kV/600 μA/0.5 s(T)

Table 3. Static test of 400 times with 6 detectors (4×25 mm²+2×50 mm²), 40 kV/600 μA/0.5 s(T)

Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s^-1

Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s^-1