Acta Optica Sinica, Volume. 27, Issue 9, 1565(2007)
Experiments and Structural Optimization of Micro-Electro-Mechanical System-Based Grating Moving Light Modulator
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experiments and Structural Optimization of Micro-Electro-Mechanical System-Based Grating Moving Light Modulator[J]. Acta Optica Sinica, 2007, 27(9): 1565