Acta Physica Sinica, Volume. 68, Issue 21, 215101-1(2019)
Fig. 1. Schematic of cylindrical hollow cathode discharge.圆筒形空心阴极放电单元截面图
Fig. 3. Distribution of charged particle density: (a) Electron; (b) Ar+. 带电粒子密度分布图 (a) 电子; (b) Ar+
Fig. 4. Distribution of excited state atoms: (a) Ar4s; (b) Ar4p; (c) Ar3d. 激发态原子密度分布图 (a) Ar4s; (b) Ar4p; (c) Ar3d
Fig. 5. Different ionization rates: (a) G1 ground state ionization; (b) G7 Penning ionization; (c) G10 Penning ionization; (d) G5 stepwise ionization不同电离速率分布图 (a) G1基态电离; (b) G7潘宁电离; (c) G10潘宁电离; (d) G5分步电离
Fig. 6. Radial distribution of different ionizations at
Fig. 7. Radial distribution of averaged electron energy and electron density at
Fig. 8. Production rate of Ar4s: (a) G2, direct excitation; (b) G20, radiation transition from Ar4p. 氩原子Ar4s能级生成速率 (a) G2, 直接激发; (b) G20, 氩原子Ar4p能级辐射跃迁
Fig. 10. The Ar4s consuming rates of different reactions: (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e. 消耗Ar4s能级的反应速率 (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e
Fig. 11. Radial distribution of the Ar4s consuming rates. 消耗Ar4s能级的反应速率一维分布图
Fig. 12. The Ar4p production rates of different reactions: (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p. 激发态氩原子Ar4p生成速率 (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p
Fig. 13. Radial distribution of the production rates of Ar4p. Ar4p生成速率的径向分布图
Fig. 14. Radial distribution of the Ar4p consuming rates. 消耗Ar4p能级的反应速率一维分布图
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Average values of the different ionization rates in the discharge region.
不同电离反应速率的平均值
Average values of the different ionization rates in the discharge region.
不同电离反应速率的平均值
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Average values of the different production rates of Ar4s in the discharge region.
Ar4s生成速率平均值
Average values of the different production rates of Ar4s in the discharge region.
Ar4s生成速率平均值
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Average values of the different consuming rates of Ar4s in the discharge region.
消耗Ar4s的不同反应速率的平均值
Average values of the different consuming rates of Ar4s in the discharge region.
消耗Ar4s的不同反应速率的平均值
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Average values of the different production rates of Ar4p in the discharge region.
Ar4p生成速率平均值
Average values of the different production rates of Ar4p in the discharge region.
Ar4p生成速率平均值
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Average values of the different consuming rates of Ar4p in the discharge region
消耗Ar4p的不同反应速率的平均值
Average values of the different consuming rates of Ar4p in the discharge region
消耗Ar4p的不同反应速率的平均值
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Shou-Jie He, Jia Zhou, Yu-Xiao Qu, Bao-Ming Zhang, Ya Zhang, Qing Li.
Received: May. 14, 2019
Accepted: --
Published Online: Sep. 17, 2020
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