Acta Physica Sinica, Volume. 68, Issue 21, 215101-1(2019)

Simulation on complex dynamics of hollow cathode discharge in argon

Shou-Jie He*, Jia Zhou, Yu-Xiao Qu, Bao-Ming Zhang, Ya Zhang, and Qing Li
Figures & Tables(20)
Schematic of cylindrical hollow cathode discharge.圆筒形空心阴极放电单元截面图
Distribution of electric potential.电势分布图
Distribution of charged particle density: (a) Electron; (b) Ar+.带电粒子密度分布图 (a) 电子; (b) Ar+
Distribution of excited state atoms: (a) Ar4s; (b) Ar4p; (c) Ar3d.激发态原子密度分布图 (a) Ar4s; (b) Ar4p; (c) Ar3d
Different ionization rates: (a) G1 ground state ionization; (b) G7 Penning ionization; (c) G10 Penning ionization; (d) G5 stepwise ionization不同电离速率分布图 (a) G1基态电离; (b) G7潘宁电离; (c) G10潘宁电离; (d) G5分步电离
Radial distribution of different ionizations at x = 1.2 mm不同电离速率一维径向分布图(x = 1.2 mm)
Radial distribution of averaged electron energy and electron density at x = 1.2 mm.平均电子能量和电子密度一维径向分布图(x = 1.2 mm)
Production rate of Ar4s: (a) G2, direct excitation; (b) G20, radiation transition from Ar4p.氩原子Ar4s能级生成速率 (a) G2, 直接激发; (b) G20, 氩原子Ar4p能级辐射跃迁
Radial production rate of Ar4s.生成4s能级的径向分布图
The Ar4s consuming rates of different reactions: (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e.消耗Ar4s能级的反应速率 (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e
Radial distribution of the Ar4s consuming rates.消耗Ar4s能级的反应速率一维分布图
The Ar4p production rates of different reactions: (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p.激发态氩原子Ar4p生成速率 (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p
Radial distribution of the production rates of Ar4p.Ar4p生成速率的径向分布图
Radial distribution of the Ar4p consuming rates.消耗Ar4p能级的反应速率一维分布图
  • Table 1. Discharge reactions in the model.

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    Table 1. Discharge reactions in the model.

    反应 标号 反应方程反应 标号 反应方程
    G1Ar + e → Ar+ + 2e[12]G17Ar4s + e → Ar3d + e[16]
    G2Ar + e → Ar4s + e[13]G18Ar4s + e → Ar4p + e[12]
    G3Ar + e → Ar4p + e[13]G19Ar4p + e → Ar4s + e[12]
    G4Ar + e → Ar3d + e[13]G20Ar4p → Ar4s + [17]
    G5Ar4s + e → Ar+ + 2e[14]G21Ar3d → Ar4p[16]
    G6Ar4p + e → Ar+ + 2e[14]G22Ar+ + 2e → Ar + e[14]
    G72Ar4s → Ar+ + Ar + e[15]G23Ar+ + e → Ar4s[12]
    G82Ar4p → Ar+ + Ar + e[16]G24Ar+ + 2e → Ar4s + e[12]
    G92Ar4s → Ar2+ + e[17]G25Ar2+ + e → 2Ar[19]
    G10Ar4s + Ar → 2Ar[18]G26Ar2+ + e → Ar+ + Ar + e[20]
    G11Ar4s + 2Ar → 3Ar[18]G27Ar2+ + e → Ar4s + Ar[16]
    G122Ar + Ar+ → Ar2+ + Arr[16]G28Ar2+ + e → 2Ar4s[21]
    G13Ar4s + 2Ar → Ar2 + Ar[15]G29Ar2+ + e → Ar4p + Ar[16]
    G14Ar4s + e → Ar + e[12]G30Ar2+ + e → Ar3d + Ar[16]
    G15Ar4s → Ar +[12]G31Ar + e → Ar + e[22]
    G16Ar4p +e → Ar + e[12]
  • Table 2.

    Average values of the different ionization rates in the discharge region.

    不同电离反应速率的平均值

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    Table 2.

    Average values of the different ionization rates in the discharge region.

    不同电离反应速率的平均值

    反应标号反应方程速率平均值/cm–3·s–1
    G1Ar + e → Ar+ + 2e 2.5 × 1017
    G5Ar4s + e → Ar+ + 2e 2.6 × 1016
    G6Ar4p + e → Ar+ + 2e 1.1 × 1015
    G72Ar4s→ Ar+ + Ar + e 3.9 × 1016
    G82Ar4p→ Ar+ + Ar + e 2.9 × 1012
    G102Ar4s→ Ar2+ + e 3.8 × 1016
  • Table 3.

    Average values of the different production rates of Ar4s in the discharge region.

    Ar4s生成速率平均值

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    Table 3.

    Average values of the different production rates of Ar4s in the discharge region.

    Ar4s生成速率平均值

    反应标号反应方程源项平均值/cm–3·s–1
    G2Ar + e → Ar4s + e 1.6 × 1017
    G19Ar4p + e → Ar4s + e 9.1 × 1015
    G20Ar4p→ Ar4s + 11.8 × 1017
    G24Ar+ + 2e → Ar4s + e 55.3
    G23Ar + e → Ar4s4.4 × 1012
    G27Ar2+ + e → Ar4s + Ar 4.3 × 1015
    G28Ar2+ + e → 2Ar4s3.9 × 1014
  • Table 4.

    Average values of the different consuming rates of Ar4s in the discharge region.

    消耗Ar4s的不同反应速率的平均值

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    Table 4.

    Average values of the different consuming rates of Ar4s in the discharge region.

    消耗Ar4s的不同反应速率的平均值

    反应标号反应方程源项平均值/cm–3·s–1
    G5Ar4s + e → Ar+ + 2e 2.6 × 1016
    G72Ar4s → Ar+ +Ar + e 7.9 × 1016
    G9Ar4s + Ar → 2Ar 3.0 × 1015
    G102Ar4s → Ar2+ + e 7.6 × 1016
    G11Ar4s + 2Ar → 3Ar 4.5 × 1015
    G13Ar4s + 2Ar → Ar2 + Ar 3.5 × 1016
    G14Ar4s + e → Ar + e 1.2 × 1015
    G15Ar4s → Ar + 1.9 × 1017
    G17Ar4s + e → Ar3d + e 1.2 × 1017
    G18Ar4s + e → Ar4p + e 8.2 × 1017
  • Table 5.

    Average values of the different production rates of Ar4p in the discharge region.

    Ar4p生成速率平均值

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    Table 5.

    Average values of the different production rates of Ar4p in the discharge region.

    Ar4p生成速率平均值

    反应标号反应方程源项平均值/cm–3·s–1
    G3Ar + e → Ar4p + e 2.2 × 1017
    G18Ar4s + e → Ar4p + e 8.2 × 1017
    G21Ar3d → Ar4p1.4 × 1017
    G29Ar2+ + e → Ar4p + Ar 4.3 × 1014
  • Table 6.

    Average values of the different consuming rates of Ar4p in the discharge region

    消耗Ar4p的不同反应速率的平均值

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    Table 6.

    Average values of the different consuming rates of Ar4p in the discharge region

    消耗Ar4p的不同反应速率的平均值

    反应标号反应方程源项平均值/cm–3·s–1
    G6Ar4p + e→Ar+ + 2e 1.1 × 1015
    G82Ar4p→Ar+ + Ar + e 5.8 × 1012
    G16Ar4p +e→Ar + e 1.3 × 1013
    G19Ar4p + e→Ar4s + e 9.1 × 1015
    G20Ar4p→Ar4s + 11.8 × 1017
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Shou-Jie He, Jia Zhou, Yu-Xiao Qu, Bao-Ming Zhang, Ya Zhang, Qing Li. Simulation on complex dynamics of hollow cathode discharge in argon[J]. Acta Physica Sinica, 2019, 68(21): 215101-1

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Paper Information

Received: May. 14, 2019

Accepted: --

Published Online: Sep. 17, 2020

The Author Email:

DOI:10.7498/aps.68.20190734

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