Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range

Xudong Gao; Qingfeng Cui; Hanqing Zheng; Yang Hu; Lin Sun; Qi Wang

doi:10.3788/AOS202040.1722001

Acta Optica Sinica, Volume. 40, Issue 17, 1722001(2020)

Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range

Xudong Gao, Qingfeng Cui^*, Hanqing Zheng, Yang Hu, Lin Sun, and Qi Wang

Author Affiliations

School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China

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Abstract Get PDF(in Chinese)

Figures & Tables(12)

Fig. 1. Model of initial structure

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Fig. 2. Initial structure of deep ultraviolet optical system

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Fig. 3. MTF curves of optical system at different temperatures. (a) -60 ℃; (b) 20 ℃; (c) 100 ℃

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$Structure of refraction-diffraction hybrid deep ultraviolet optical system$

Fig. 4. Structure of refraction-diffraction hybrid deep ultraviolet optical system

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$MTF curves of refractive-diffraction hybrid optical systems at different temperatures. (a) -60 ℃;(b) 20 ℃; (c) 100 ℃$

Fig. 5. MTF curves of refractive-diffraction hybrid optical systems at different temperatures. (a) -60 ℃;(b) 20 ℃; (c) 100 ℃

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Fig. 6. Characteristic parameter curves of SLDOE

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$Diffraction efficiency of calcium fluoride crystals in the deep ultraviolet band. (a) Diffraction efficiency curves at different temperatures; (b) three-dimensional model of temperature, wavelength and diffraction efficiency$

Fig. 7. Diffraction efficiency of calcium fluoride crystals in the deep ultraviolet band. (a) Diffraction efficiency curves at different temperatures; (b) three-dimensional model of temperature, wavelength and diffraction efficiency

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Fig. 8. Estimated results of MTF

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Table 1. Parameters of system
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Table 1. Parameters of system
Parameter Value
wavelength range /nm 230--270
EFL /mm 110
F-number 3.5
FOV /(°) ±10
MTF >0.65@18.5 lp/mm
temperature range /℃ -60--100
housing material aluminum(23.6×10^-6 /℃)

Table 2. Partial solution parameters of lens group

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Table 2. Partial solution parameters of lens group

Serialnumber	φ₁	φ₂	φ₃	Glass1	Glass2	Glass3	$\sum X_{TchC}$	$\sum X_{TC}$
1	1.51	-2.45	1.94	CAF2	F_SILICA	MGF2	-2.42×10^-4	-1.10×10^-4
2	1.60	-2.52	1.92	CAF2	F_SILICA	MGF2	-7.59×10^-4	-1.16×10^-4
3	1.73	-2.74	2.01	CAF2	F_SILICA	MGF2	-3.37×10^-3	-1.26×10^-4
4	1.80	-3.31	2.51	CAF2	F_SILICA	MGF2	-7.65×10^-3	-1.71×10^-4
5	-3.45	1.53	2.92	CAF2	F_SILICA	MGF2	3.23×10^-4	1.75×10^-4

Table 3. Changes of system parameters with temperature after adiabatic difference
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Table 3. Changes of system parameters with temperature after adiabatic difference
Temperature /℃ Spotdiagram /μm Encircledenergy /%
-60 12.675 81.194
-40 11.760 81.126
20 12.120 81.318
60 12.159 81.801
100 12.224 80.032

Table 4. Machining tolerance of the refraction-diffraction hybrid system

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Table 4. Machining tolerance of the refraction-diffraction hybrid system

Parameter	Tolerancespecification
surface aperture	±2
thickness tolerance /mm	±0.05
X-eccentricity of lens element /mm	±0.05
Y-eccentricity of lens element /mm	±0.05
X-inclination of lens element	±3'
Y-inclination of lens element	±3'
X-eccentricity of lens surface /mm	±0.08
Y-eccentricity of lens surface /mm	±0.08
X-inclination of lens surface	±4.8'
Y-inclination of lens surface	±4.8'
surface irregularity tolerance	±0.5
refractive index tolerance	±1×10^-3

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Xudong Gao, Qingfeng Cui, Hanqing Zheng, Yang Hu, Lin Sun, Qi Wang. Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range[J]. Acta Optica Sinica, 2020, 40(17): 1722001

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