Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging

Zebin HE; Chang CHEN; Junsheng YANG; Binglin YANG; Shuang WANG; Kewu LI; Qiannan WU

doi:10.5768/JAO202546.0203004

Journal of Applied Optics, Volume. 46, Issue 2, 388(2025)

Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging

Zebin HE^1,3,4, Chang CHEN², Junsheng YANG², Binglin YANG², Shuang WANG^3,4, Kewu LI^2,3,4, and Qiannan WU^1,3,4、*

Author Affiliations

¹School of Semiconductor and Physics, North University of China, Taiyuan 030051, China

²School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China

³Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China

⁴School of Instrument and Intelligent Provincial Future Technology, North University of China, Taiyuan 030051, China

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Figures & Tables(10)

Fig. 1. Basic schematic diagram of measurement

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Fig. 2. Experimental system

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Fig. 3. Organic contamination detection

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Fig. 4. Fusion image of organic contamination

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Fig. 5. Solid particle contamination detection

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Fig. 6. Fusion image of solid particle contamination

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Table 1. Comparison of image quality data
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Table 1. Comparison of image quality data
图像类别图像信息熵平均梯度
多角度偏振图像 $I_{0}$ 4.180 7 78.044 0
偏振度图像 4.783 4 408.814 3
融合图像 6.684 9 412.140 0

Table 2. Evaluation results of calculation quantity
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Table 2. Evaluation results of calculation quantity
图像类别多角度偏振图像 $I_{0}$ 偏振度图像融合图像
运算时间/s 0.108 0.112 0.121

Table 3. Comparison of image quality data
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Table 3. Comparison of image quality data
图像类别图像信息熵平均梯度
多角度偏振图像 $I_{0}$ 4.934 1 71.774 2
偏振度图像 5.684 1 430.620 0
融合图像 6.943 0 445.122 0

Table 4. Evaluation results of calculation quantity
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Table 4. Evaluation results of calculation quantity
图像类别多角度偏振图像 $I_{0}$ 偏振度图像融合图像
运算时间/s 0.118 0.126 0.131

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Zebin HE, Chang CHEN, Junsheng YANG, Binglin YANG, Shuang WANG, Kewu LI, Qiannan WU. Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging[J]. Journal of Applied Optics, 2025, 46(2): 388

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