Chinese Optics Letters, Volume. 11, Issue s1, S10209(2013)

Modelling and optimization of f ilm thickness variation for plasma enhanced chemical vapour deposition processes

Xiuhua Fu, Lin Li, Gibson Des, Waddell Ewan, and Wingo Lv
References(14)

[1] [1] L. L. Alt, S. W. Ing, Jr., and K. W. Laendle, J. Electrochem. Soc. 110, 465 (1963).

[2] [2] S. W. Ing, Jr., and W. Davern, J. Electrochem. Soc. 111, 120 (1964).

[3] [3] S. W. Ing, Jr., and W. Davern, J. Electrochem. Soc. 112, 284 (1965).

[4] [4] A. R. Reinbergh, Electrochem. Soc. Ext. Abstr. 6, 19 (1974).

[5] [5] D. E. Carlson, C. W. Magee, and A. R. Triano, J. Electrochem. Soc. Solid-State Sci. Technol. 126, 688 (1979).

[6] [6] W. C. O’Mara, Liquid Crystal Flat Panel Displays: Manufacturing Science and Technology (Van Nostrand Reinhold, New York, 1993).

[7] [7] S. Sherman, S. Wagner, J. Mucha, and R. A. Gottscho, J. Electrochem. Soc. 144, 3198 (1997).

[8] [8] E. Cianci, A. Schina, A. Minotti, S. Quaresima, and V. Foglietti, Sensor. Actuator. Phys. 127, 80 (2006).

[9] [9] D. R. Gibson, E. M. Waddell, A. D. Wilson, and K. Lewis, Opt. Eng. 33, 957 (1994).

[10] [10] D. R. Gibson, E. M. Waddell, and K. Lewis, Proc. SPIE 2286, 335 (1994).

[11] [11] A. Grill, Cold Plasma in Materials Fabrication (IEEE Press, New York, 1993).

[12] [12] A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York, 1994).

[13] [13] A. von Keudell, Plasma Sourc. Sci. Technol. 9, 455 (2000).

[14] [14] J. R. Roth, Industrial Plasma Engineering Volume 2: Application to Nonthermal Plasma Processing (CRC Press, Boca Raton, 2001).

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Xiuhua Fu, Lin Li, Gibson Des, Waddell Ewan, Wingo Lv, "Modelling and optimization of f ilm thickness variation for plasma enhanced chemical vapour deposition processes," Chin. Opt. Lett. 11, S10209 (2013)

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Paper Information

Category: Deposition and process control

Received: Jan. 7, 2013

Accepted: Jan. 27, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10209

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