APPLIED LASER, Volume. 39, Issue 2, 279(2019)

Holographic Defocus Control in Femtosecond Laser Processing with High NA Objective

Fang Zheng1、*, Liu Dun1,2, Zhai Zhongsheng1,2, Wang Yutao3,4, Wang Li3, Zheng Zhong1,2, and Cheng Jian1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • show less
    References(16)

    [1] [1] TKACZYK T S.Field guide to microscopy[M].Washington:SPIE Press,2010.

    [2] [2] WELFORD W T.Use of annular apertures to increase focal depth[J].Josa,1960,50(8):749-752.

    [3] [3] GHOSH S,KANWAR A J,KAUR S.Annular apodizers for low sensitivity to defocus and to spherical aberration[J].Optics Letters,1986,11(8):487-489.

    [4] [4] PANTAZIS M. Depth of field extension with spherical optics[J]. Optics Express, 2008, 16(17): 12995-13004.

    [5] [5] BAKARAJU R C,EHRMANN K,PAPAS E B,et al.Depth-of-focus and its association with the spherical aberration sign.A ray-tracing analysis[J].Journal of Optometry,2010,3(1):51-59.

    [6] [6] RIVOLTA C.Depth of focus of optical systems with a small amount of spherical aberration[J].Applied Optics,1990,29(22):3249-3254.

    [7] [7] ZALEVSKY Z.Extended depth of focus imaging:a review[J].SPIE Reviews,2010, 1(1):18001-18011.

    [8] [8] OJEDA-CASTAEDA J,GMEZ-SARABIA C M.Tuning field depth at high resolution by pupil engineering[J].Advances in Optics and Photonics,2015,7(4): 814-880.

    [9] [9] COLOMB T,PAVILLON N,KHN J,et al.Extended depth-of-focus by digital holographic microscopy[J].Optics Letters,2010,35(11):1840-1842.

    [10] [10] CUMMING B P,JESACHER A,BOOTH M J,et al.Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate[J].Optics Express,2011,19(10):9419-9425.

    [11] [11] WALLER E H,RENNER M,VON FREYMANN G.Active aberration-and point-spread-function control in direct laser writing[J].Optics Express,2012,20(22):24949-24956.

    [12] [12] MAUCLAIR C,MERMILLOD-BLONDIN A,HUOT N,et al.Ultrafast laser writing of homogeneous longitudinal waveguides in glasses using dynamic wavefront correction[J].Optics Express,2008,16(8):5481-5492.

    [13] [13] SALTER P S,BOOTH M J.Focussing over the edge:adaptive subsurface laser fabrication up to the sample face[J].Optics Express,2012,20(18):19978-19989.

    [14] [14] MAUCLAIR C,MERMILLOD-BLONDIN A,LANDON S,et al.Single-pulse ultrafast laser imprinting of axial dot arrays in bulk glasses[J].Optics Letters,2011,36(3):325-327.

    [15] [15] SALTER P S,BAUM M,ALEXEEV I,et al.Exploring the depth range for three-dimensional laser machining with aberration correction[J].Optics Express,2014,22(15): 17644-17656.

    [16] [16] SANNER N, HUOT N, AUDOUARD E, et al.Direct ultrafast laser micro-structuring of materials using programmable beam shaping[J].Optics and Lasers in Engineering,2007,45(6):737-741.

    Tools

    Get Citation

    Copy Citation Text

    Fang Zheng, Liu Dun, Zhai Zhongsheng, Wang Yutao, Wang Li, Zheng Zhong, Cheng Jian. Holographic Defocus Control in Femtosecond Laser Processing with High NA Objective[J]. APPLIED LASER, 2019, 39(2): 279

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Apr. 9, 2019

    Accepted: --

    Published Online: Jun. 10, 2019

    The Author Email: Zheng Fang (fangzheng603@163.com)

    DOI:10.14128/j.cnki.al.20193902.279

    Topics