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Laser & Optoelectronics Progress, Volume. 60, Issue 24, 2412006(2023)

Polished Surface Defect Detection Based on Intelligent Surface Analysis

Zihao Li1,2, Fengzhou Fang1,2、*, Zhonghe Ren1,2, and Gaofeng Hou1,2
Author Affiliations
  • 1State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin 300072, China
  • 2Labotatory of Micro/Nano Manufacturing Technology (MNMT), Tianjin 300072, China
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    Article index updated: Sep. 11, 2025

    The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)
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    Zihao Li, Fengzhou Fang, Zhonghe Ren, Gaofeng Hou. Polished Surface Defect Detection Based on Intelligent Surface Analysis[J]. Laser & Optoelectronics Progress, 2023, 60(24): 2412006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 15, 2023

    Accepted: Apr. 23, 2023

    Published Online: Nov. 27, 2023

    The Author Email: Fengzhou Fang (fzfang@tju.edu.cn)

    DOI:10.3788/LOP230868

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology