INFRARED, Volume. 43, Issue 2, 34(2022)
Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector
References(1)
[3] [3] Kim C S, Ahn S H, Jang D Y. Review: Developments in micro/nanoscale fabrication by focused ion beams［J］. Vacuum, 2012, 86(8): 1014-1035.
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LI Qian, HUANG Ting, SHE Wei-lin, WANG Dan, XING Wei-rong. Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector[J]. INFRARED, 2022, 43(2): 34
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Received: Oct. 18, 2021
Accepted: --
Published Online: Jun. 14, 2022
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