Laser & Optoelectronics Progress, Volume. 56, Issue 17, 170625(2019)

A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS

Taojie Zhang**, Yi Jiang*, and Weiyi Ma
Author Affiliations
  • School of Opto-Electronics, Beijing Institute of Technology, Beijing 100081, China
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    Figures & Tables(8)
    Schematic of sensor structure
    Change of reflected light intensity with fineness and phase
    Relationship between the radius and the sensitivity at different film thicknesses
    Process flow of sensor head fabrication. (a) Oxidative deposition protective layer; (b) lithography; (c) etching; (d) coating; (e) remove the protective layer; (f) bond
    Sensor spectrogram
    Initial cavity length of optical fiber F-P pressure sensor
    Fitting curves of pressure and cavity length
    Temperature characteristics of optical fiber F-P pressure sensor
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    Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Mar. 22, 2019

    Accepted: Apr. 25, 2019

    Published Online: Sep. 5, 2019

    The Author Email: Taojie Zhang (zhangtaojie958@foxmail.com), Yi Jiang (bitjy@bit.deu.cn)

    DOI:10.3788/LOP56.170625

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