Laser & Optoelectronics Progress, Volume. 56, Issue 17, 170625(2019)
A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS
Fig. 3. Relationship between the radius and the sensitivity at different film thicknesses
Fig. 4. Process flow of sensor head fabrication. (a) Oxidative deposition protective layer; (b) lithography; (c) etching; (d) coating; (e) remove the protective layer; (f) bond
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Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625
Category: Fiber Optics and Optical Communications
Received: Mar. 22, 2019
Accepted: Apr. 25, 2019
Published Online: Sep. 5, 2019
The Author Email: Taojie Zhang (zhangtaojie958@foxmail.com), Yi Jiang (bitjy@bit.deu.cn)