Fig. 1. Schematic of Mirau-type interference microscope principle

Fig. 2. Visual effect of point cloud after down-sampling. (a) Sample 1; (b) sample 2; (c) sample 3

Fig. 3. Visual effect of point cloud after statistical filtering. (a) Sample 1; (b) sample 2; (c) sample 3

Fig. 4. Visual effect of point cloud after radius filtering. (a) Sample 1; (b) sample 2; (c) sample 3

Fig. 5. Schematic of triangulation

Fig. 6. Schematic of constructing bounding box

Fig. 7. Schematic of model taking three points as an example

Fig. 8. Reconstruction results of sample 1. (a) Reconstructed 2D effect; (b) reconstructed 3D effect

Fig. 9. Reconstruction results of sample 2. (a) Reconstructed 2D effect; (b) reconstructed 3D effect

Fig. 10. Reconstruction results of sample 3. (a) Reconstructed 2D effect; (b) reconstructed 3D effect

Fig. 11. Instrumental test results of sample 1. (a) Topographic map obtained by Vision software; (b) topographic map obtained by T-H profiler; (c) profile contour line obtained by T-H profiler' software

Fig. 12. Instrumental test results of sample 2. (a) Topographic map obtained by Vision software; (b) topographic map obtained by T-H profiler; (c) profile contour line obtained by T-H profiler' software

Fig. 13. Instrumental test results of sample 3. (a) Topographic map obtained by Vision software; (b) topographic map obtained by T-H profiler; (c) profile contour line obtained by T-H profiler' software