In this study, the damage mechanism of thin film components is revealed by reconstructing the three-dimensional (3D) micro-morphology of a damaged optical film surface and by analyzing and studying the damage process and image damage characteristics of thin film components after laser irradiation. The interference microscopic 3D cloud data of the damaged thin film surface is collected based on the principle of white light interference microscopy. The triangular mesh model of the damaged surface is constructed using the Delaunay triangulation method. Moreover, the 3D micro-topography of the damaged surface is reproduced through a visual simulation. The results show that the surface damage areas of HfO₂ films tested in the experiments are pit-shaped. The damage morphology is irregular (i.e., many bulges and cracks exist inside). In addition, the edge steepness greatly changes, and more burrs are observed. Compared with the reconstructed image, processing results of the VEECO Vision software, and test results of the Taylor-Hobson non-contact profiler, the reconstructed image can more intuitively and comprehensively reproduce the micro-morphology of a damaged surface. The results provide technical support for analyzing the morphology of the damaged surface and controlling the preparation process of films with high-damage threshold.