Frontiers of Optoelectronics, Volume. 5, Issue 3, 292(2012)

Research on VOx uncooled infrared bolometer based on porous silicon

Bin WANG1,2, Jianjun LAI1,2、*, Erjing ZHAO1, Haoming HU1, and Sihai CHEN1,2
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China
  • show less
    References(11)

    [1] [1] Gu X, Karunasiri G, Chen G, Sridhar U, Xu B. Determination of thermal parameters of microbolometers using a single electrical measurement. Applied Physics Letters, 1998, 72(15): 1881-1883

    [2] [2] Niklaus F, Vieider C, Jakobsen H. MEMS-based uncooled infrared bolometer arrays-a review. Proceedings of SPIE, 2007, 6836, 68360D1-6836D15

    [3] [3] Mottin E, Martin J L, Ouvrier-Buffet J L, Vilain M, Bain A, Yon J J, Tissot J L, Chatard J P. Enhanced amorphous silicon technology for 320×240 microbolometer arrays with a pitch of 35 μm. Proceedings of SPIE, 2001, 4369: 250-256

    [4] [4] Kosasayama Y, Sugino T, Nakaki Y, Fujii Y, Inoue H, Yagi H, Hata H, Ueno M, Takeda M, Kimata M. Pixel scaling for SOI-diode uncooled infrared focal plane arrays. Proceedings of SPIE, 2004, 5406: 504-511

    [5] [5] Wallner J Z, Bergstrom P L. A porous silicon based particle filter for microsystems. Physica Status Solidi (a), 2007, 204(5): 1469-1473

    [6] [6] Tsamis C, Tserepi A, Nassiopoulou A G. Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications. Physica Status Solidi (a), 2003, 197(2): 539-543

    [7] [7] Lysenko V, Perichon S, Remaki B, Barbier D. Thermal isolation in microsystems with porous silicon. Sensors and Actuators A: Physical, 2002, 99(1-2): 13-24

    [8] [8] Steiner P, Richter A, Lang W. Using porous silicon as a sacrificial layer. Journal of Micromechanics and Microengineering, 1993, 3(1): 32-36

    [9] [9] Searson P C. Porous silicon membranes. Applied Physics Letters, 1991, 59(7): 832-833

    [10] [10] Kishino K, Unlu M S, Chyi J I, Reed J, Arsenault L, Morkoc H. Resonant cavity enhanced photodetectors. IEEE Journal of Quantum Electron, 1991, 27(8): 2025-2034

    [11] [11] Wang H C, Yi X J, Huang G, Xiao J, Li X W, Chen S H. IR microbolometer with self-supporting structure operating. Infrared Physics & Technology, 2004, 45(1): 53-57

    Tools

    Get Citation

    Copy Citation Text

    Bin WANG, Jianjun LAI, Erjing ZHAO, Haoming HU, Sihai CHEN. Research on VOx uncooled infrared bolometer based on porous silicon[J]. Frontiers of Optoelectronics, 2012, 5(3): 292

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Oct. 26, 2011

    Accepted: May. 8, 2012

    Published Online: Oct. 12, 2012

    The Author Email: Jianjun LAI (jjlai@mail.hust.edu.cn)

    DOI:10.1007/s12200-012-0224-7

    Topics