Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO<sub>2</sub> Laser Processing

Zhuonan Jia; Tingting Zhang; Zhenghua Li; Shuangquan Hua; Wenjie Wang

doi:10.3788/LOP57.231404

Laser & Optoelectronics Progress, Volume. 57, Issue 23, 231404(2020)

Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO₂ Laser Processing

Zhuonan Jia^*, Tingting Zhang, Zhenghua Li, Shuangquan Hua, and Wenjie Wang

Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China

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Zhuonan Jia, Tingting Zhang, Zhenghua Li, Shuangquan Hua, Wenjie Wang. Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO₂ Laser Processing[J]. Laser & Optoelectronics Progress, 2020, 57(23): 231404

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Paper Information

Category: Lasers and Laser Optics

Received: Mar. 27, 2020

Accepted: May. 15, 2020

Published Online: Nov. 25, 2020

The Author Email: Zhuonan Jia (jiazhuonan2020@163.com)

DOI:10.3788/LOP57.231404

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology