Surface Coating Technique of Reaction Bonded SiC Mirrors

XU Ling-di; ZHANG Xue-jun; WANG Xu

Opto-Electronic Engineering, Volume. 36, Issue 1, 120(2009)

XU Ling-di^1,2、*, ZHANG Xue-jun¹, and WANG Xu^1,2

Author Affiliations

¹[in Chinese]

²[in Chinese]

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References(8)

[1] [1] Joseph Robichaud. SiC Optics for EUV，UV，and Visible Space Missions [J]. SPIE，2003，4854：39-49.

[2] [2] ZHANG Ge，ZHAO Ru-cheng，ZHAO Wen-xin. Fabrication and test of large scale light-weight SiC mirror [J]. Optics and Precision Engineering，2006，14(5)：759-763.

[3] [3] MA Wen-li，SHEN Mang-zuo. Weightlight SiC mirror technology [J]. Optics and Precision Engineering，1999，4(2)：8-12.

[4] [4] Matthew B Magida，Roger A Paquin. Dimensional stability of bare and coated reaction bonded silicon carbide [J]. SPIE，1990，1335：60-69.

[5] [5] FAN Di. The study on CCOS of large-diameter SiC mirrors[D]. Changchun：Changchun Institute of Optics，Fine Mechanics and Physics，2004.

[6] [6] YANG Li. Fabricate techniques in advanced optics [M]. Beijing：Science Press，2001.

[7] [7] TANG Hui-dong，HUANG Zheng-ren，TAN Shou-hong. PVD-SiC and PVD-Si coatings on RB-SiC for surface modification [J]. SPIE，2006，6149：1-6.

[8] [8] ZHOU Yu-feng，ZHANG Yu-min，HAN Jie-cai. Preparation of Silicon Coating [J]. Materials Review，2005，19(12)：84-86

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XU Ling-di, ZHANG Xue-jun, WANG Xu. Surface Coating Technique of Reaction Bonded SiC Mirrors[J]. Opto-Electronic Engineering, 2009, 36(1): 120

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Paper Information

Category:

Received: Jul. 28, 2008

Accepted: --

Published Online: Oct. 9, 2009

The Author Email: Ling-di XU (xuldi@126.com)

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology