[1] [1] LI Y H, SUN X G, YUAN G B. Accurate measuring temperature with infrared thermal imager[J].Opt.Precision Eng.,2007,15(9):1336-1341.

[2] [2] EERNISSE E P, WIGGINS R B. Review of thickness-shear mode quartz resonator sensors for temperature and pressure[J].IEEE Sensors Journal,2001(1):79-87.

[3] [3] LIU J,QIN L, LIU J C,et al.. A novel differential piezoelectric accelerating sensor[J].Opt.Precision Eng.,2007,15(6):903-909.

[4] [4] WADE W H, SLUTSKY L J.Quartz crystal thermometer[J].Reu.Sci.Instrum.,1962,33:212-213

[5] [5] SMITH W, SPENCER W. Quartz crystal thermometer for measuring temperature deviations in the 10-3 to 10-6 ℃ range[J].Rev. Sci. Instrum.,1963,34:268-270.

[6] [6] SPSSOV L, YOSSIFFOV L, GEOPGIEV E,et al..A rotated Y-cut quartz resonator with a linear temperature-frequency characteristic [J]. Sensors and Actuators A ,1997,58:185-189.

[7] [7] HAMMOND D,ADAMS C, SCHMIDT P. A linear quartz crystal temperature sensing element [J].ISA Trans.,1965(4):349-354

[8] [8] DINGER R J. The torsional tuning fork as a temperature sensor[C].Proceeding of the36th Annual Symposium on Frequency Control,Philadelphia,Pennsylvania,USA,1982:264-274.

[9] [9] UEDA T, KOHSAKA F,IINO T,et al.. Temperature sensor using quartz tuning fork resonator [C].Proceeding of the40th Annual Symposium on Frequency Control,Philadelphia,Pennsylvaniaa,SUA,1986:224-229.

[10] [10] XU J, YOU B, LI X. Theoretical model and optimization of a novel temperature sensor based on quartz tuning fork resonators [J].phys.Scr.,2007,T129:316-320.

[11] [11] GREGER T, HAKAN R, KLAS H.X-Cut miniature tuning forks realized by ion track lithography[J]. IEEE Trans.Ultrason. Ferroelectrics Freq. Control,2000,47:8-15.

[12] [12] WANG X, ZHAO X, MA D S Optimization of solidification process parameters stereo lithograph[J].Opt.Precision Eng.,2007,15(4):453-459.

[13] [13] FRIEDT J M, CARRY D E. Introduction to the quartz tuning fork [J].American Journal of Physics,2007,75:415-422.

[14] [14] LEE S,MOON Y,YOON J. Analytical and fintie element method design of quartz tuning fork resonator and experimental test samples manufactured using photolithography 1-significant design parameters affecting static capacitance[J].Vacuum,2004,75:57-69.

[15] [15] KAN J W,TANG K H, WANG S Y, et al..Modeling and simulation of piezoelectric cantilever generators [J].Opt. Precision Eng., 2008,16(1):71-75.

[16] [16] QUINTANS C. A virtual instrumentation laboratory based on a reconfigurable coprocessor [J]. IEEE Trans. Instrum. Meas.,2006,55:635-644.

[17] [17] ARNOLD E, NUSCHELER F. Compensation methods for a silicon tuning fork gyroscope [J].Journal of Microsyst Technol.,2008,14:623-628.