Chinese Optics Letters, Volume. 8, Issue s1, 170(2010)

Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity

Songwen Deng1,2, Hongji Qi1, Chaoyang Wei1, Kui Yi1, Zhengxiu Fan1, and Jianda Shao1
Author Affiliations
  • 1Optical Films Technology R &
  • 2D Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    A fine layer structure in the Ni/C multilayer (3-4 nm/6-7 nm) is deposited by magnetic sputtering by combining soft X-ray resonant reflectivity curve at 4.48 nm and grazing incidence X-ray reflectivity (GIXR) curve at 0.14 nm. It is found that the thickness of Ni-on-C interface is much rougher than C-on-Ni interface. By analyzing the optical constants, it shows that the interface in the Ni/C multilayer that of system is a mixture of Ni and C atoms; the Ni and C in multilayer system have excellent stability, and no interlayer is formed.

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    Songwen Deng, Hongji Qi, Chaoyang Wei, Kui Yi, Zhengxiu Fan, Jianda Shao, "Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity," Chin. Opt. Lett. 8, 170 (2010)

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    Paper Information

    Received: Nov. 30, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0170

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