Fig. 1. Schematic diagram of integrated experimental platform for micro-vibration simulation and active-passive vibration isolation

Fig. 2. Finite element model of experimental platform

Fig. 3. First sixth modals of integrated experimental platform

Fig. 4. Principle for air-floating passive vibration isolation

Fig. 5. Effect of passive vibration isolation in different directions

Fig. 6. Principle of active vibration isolation based on feedback

Fig. 7. Active damping control loop

Fig. 8. Electronic control system

Fig. 9. Effect of active vibration isolation in different directions

Fig. 10. Distribution of sensors in micro-vibration simulated measurement

Fig. 11. Time domain simulation results of single frequency harmonic

Fig. 12. Test results of single frequency harmonic simulation

Fig. 13. Test results of multifrequency harmonic simulation