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Acta Optica Sinica, Volume. 5, Issue 1, 43(1985)

Microfabrication of holographic blazed grating by reactive ion beam etching

FU XINDING1, ZHENG YANFANG1, CHENG LIZHI1, REN CONGXIN1, CAI XUEQIANG2, QU ZHIMING2, XU YINMING2, and LI MEIYUE2
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    CLP Journals

    [1] Wang Haibin, Liu Quan, Wu Jianhong. Fabrication of Convex Blazed Grating By Ar+ Ion-Beam Etching[J]. Acta Optica Sinica, 2011, 31(4): 405002

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    FU XINDING, ZHENG YANFANG, CHENG LIZHI, REN CONGXIN, CAI XUEQIANG, QU ZHIMING, XU YINMING, LI MEIYUE. Microfabrication of holographic blazed grating by reactive ion beam etching[J]. Acta Optica Sinica, 1985, 5(1): 43

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    Paper Information

    Category: Holography

    Received: Jun. 22, 1984

    Accepted: --

    Published Online: Sep. 16, 2011

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology