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Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 567(2025)

High-Precision Piezoelectric Drive System Based on Neural Sliding Mode Control

LI Shuaikang1,2, QI Xue1,2, LI Heming1,2, ZHAO Meiting1,2, FAN Le1,2, and TAN Qiulin1,2
Author Affiliations
  • 1Key Laboratory of Micro/nano Devices and Systems，Ministry of Education，North University of China，Tai yuan 030051，China
  • 2Science and Technology on Electronic Test and Measurement Laboratory，North University of China，Tai yuan 030051，China
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    LI Shuaikang, QI Xue, LI Heming, ZHAO Meiting, FAN Le, TAN Qiulin. High-Precision Piezoelectric Drive System Based on Neural Sliding Mode Control[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 567

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    Received: Jan. 9, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.026

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology