Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 567(2025)

High-Precision Piezoelectric Drive System Based on Neural Sliding Mode Control

LI Shuaikang1,2, QI Xue1,2, LI Heming1,2, ZHAO Meiting1,2, FAN Le1,2, and TAN Qiulin1,2
Author Affiliations
  • 1Key Laboratory of Micro/nano Devices and Systems,Ministry of Education,North University of China,Tai yuan 030051,China
  • 2Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Tai yuan 030051,China
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    A high-precision motion control system for an in-plane longitudinal bending composite mode linear piezoelectric actuator is proposed. This system can realize precise output control with nanometer position error and millimeter velocity error and ensure accurate tracking of the predefined reference trajectory. The control system combines a sliding-mode state observer(SMO)with a disturbance observer(DOB)for real-time observation of the system state and external disturbances. The position sensor and SMO are used to estimate the system state values accurately,and the radial basis function neural network controller is used to adjust the parameters adaptively online to ensure precise control of the piezoelectric actuator based on the error-generating control law. The synergistic effect of the DOB and SMO significantly reduces the observation error and strengthens the resistance of the system to disturbances. In addition,this study derives the stability of the control law based on the Lyapunov stability,and the effectiveness of the method is verified through simulations and experiments. The actual position error is controlled within ±60 nm,and the velocity error is controlled within ±0.025 mm/s.

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    LI Shuaikang, QI Xue, LI Heming, ZHAO Meiting, FAN Le, TAN Qiulin. High-Precision Piezoelectric Drive System Based on Neural Sliding Mode Control[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 567

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    Paper Information

    Category:

    Received: Jan. 9, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.026

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