Diffraction Efficiency of Enhanced Phase Grating

$Diffraction efficiency of 0th-9th order signals as a function of groove depth. (a) Zero order; (b) odd diffraction orders; (c) even diffraction orders$

Fig. 2. Diffraction efficiency of 0th-9th order signals as a function of groove depth. (a) Zero order; (b) odd diffraction orders; (c) even diffraction orders

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$Diffraction efficiency of zero order as a function of duty ratio$

Fig. 3. Diffraction efficiency of zero order as a function of duty ratio

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$Diffraction efficiency of 1st-9th order signals as a function of f2. (a) Odd diffraction orders; (b) even diffraction orders$

Fig. 4. Diffraction efficiency of 1st-9th order signals as a function of f₂. (a) Odd diffraction orders; (b) even diffraction orders

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$Diffraction efficiency of 0th-9th order signals as a function of position of grating ridge. (a) Odd diffraction orders; (b) even diffraction orders$

Fig. 5. Diffraction efficiency of 0th-9th order signals as a function of position of grating ridge. (a) Odd diffraction orders; (b) even diffraction orders

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$Diffraction efficiency of 0th order signal as a function of groove depth and duty ratio$

Fig. 6. Diffraction efficiency of 0^th order signal as a function of groove depth and duty ratio

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$Phase grating structure without even diffraction orders and its characteristic. (a) Phase grating structure without even diffraction orders; (b) first half-period structure and second half-period structure are complementary$

Fig. 7. Phase grating structure without even diffraction orders and its characteristic. (a) Phase grating structure without even diffraction orders; (b) first half-period structure and second half-period structure are complementary

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$Enhanced phase grating structure with 180° rotational symmetry and without zero and even diffraction orders$

Fig. 8. Enhanced phase grating structure with 180° rotational symmetry and without zero and even diffraction orders

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$Grating structure with zero and even order diffraction missing when N=3$

Fig. 9. Grating structure with zero and even order diffraction missing when N=3

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$Ehanced grating structure without zero and even diffraction orders when N=5$

Fig. 10. Ehanced grating structure without zero and even diffraction orders when N=5

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$Diffraction efficiency of odd diffraction orders as a function of f1$

Fig. 11. Diffraction efficiency of odd diffraction orders as a function of f₁

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Fig. 12. Optimized grating structure when number of ridges N=3. (a) Evaluation function W as a function of f₁; (b) structure of IME3

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$Diffraction efficiency of odd diffraction order signals as a function of f1 and f2. (a) 1st diffraction order; (b) 3rd diffraction order; (c) 5th diffraction order; (d) 7th diffraction order; (e) 9th diffraction order$

Fig. 13. Diffraction efficiency of odd diffraction order signals as a function of f₁ and f₂. (a) 1st diffraction order; (b) 3rd diffraction order; (c) 5th diffraction order; (d) 7th diffraction order; (e) 9th diffraction order

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Fig. 14. Optimized grating structure when number of ridges N=5. (a) Evaluation function as a function of f₁ and f₂; (b) structure of IME5

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Fig. 15. Structures of phase grating in a period. (a) AH11; (b) AH53

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$Diffraction results of each structure obtained by rigorous coupled-wave analysis method for TM polarization illumination. (a) AH11; (b) AH53; (c) IME3; (d) IME5$

Fig. 16. Diffraction results of each structure obtained by rigorous coupled-wave analysis method for TM polarization illumination. (a) AH11; (b) AH53; (c) IME3; (d) IME5

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Table 1. Structural parameters of phase grating without zero and even order diffraction
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Table 1. Structural parameters of phase grating without zero and even order diffraction
Parameter Ridge width Ridge position Groove depth /λ
Value 2/14, 1/14, 1/14, 2/14, 1/14 -10/28, -3/28, 1/28, 8/28, 13/28 0.25

Table 2. Diffraction efficiency of phase grating without zero and even order diffraction
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Table 2. Diffraction efficiency of phase grating without zero and even order diffraction
Order 0 1 2 3 4 5 6 7 8 9
Diffraction efficiency /% 0 1.59 0 10.89 0 17.09 0 7.44 0 5.28

Table 3. Structural parameters of IME3
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Table 3. Structural parameters of IME3
Parameter Ridgewidth Ridgeposition Groovedepth /λ
IME3 0.066, 0.368,0.066 0.283, 0,0.283 0.250

Table 4. Structural parameters of IME5
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Table 4. Structural parameters of IME5
Parameter Ridge width Ridge position Groove depth/λ
IME5 0.065, 0.154, 0.062, 0.154, 0.065 0.4365, 0.3270, 0, 0.3270, 0.4365 0.25

Table 5. Comparison of diffraction efficiency of each structure calculated by using RCWA and scalar diffraction theory%

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Table 5. Comparison of diffraction efficiency of each structure calculated by using RCWA and scalar diffraction theory%

Order	AH11			AH53			IME3			IME5
Order	TM	TE	Scalardiffractiontheory	TM	TE	Scalardiffractiontheory	TM	TE	Scalardiffractiontheory	TM	TE	Scalardiffractiontheory
0	0	0	0	4.96	5.53	5.57	0.02	0.12	0	0.04	0.32	0
1	14.12	14.12	14.12	3.80	3.69	3.53	9.73	9.73	9.85	0.90	0.87	0.90
2	0	0	0	0.49	0.48	0.47	0.01	0.08	0.00	0.01	0.03	0
3	1.57	1.57	1.57	0.41	0.40	0.39	0.20	0.21	0.17	5.30	5.38	5.31
4	0.00	0.00	0.00	2.14	2.08	2.09	0.00	0.01	0.00	0	0.01	0
5	0.56	0.56	0.56	5.03	4.92	5.08	2.16	2.21	2.06	3.24	3.27	3.26
6	0	0	0	0.87	0.86	0.93	0	0	0	0.01	0.05	0
7	0.29	0.29	0.29	0.06	0.06	0.07	2.46	2.53	2.46	2.11	2.15	2.13
8	0	0	0	0.02	0.02	0.03	0.00	0.01	0	0	0.02	0
9	0.17	0.17	0.17	0.02	0.02	0.04	1.20	1.25	1.29	3.43	3.56	3.49

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Guanghua Yang, Yu Wang, Jing Li, Yuejing Qi, Minxia Ding. Diffraction Efficiency of Enhanced Phase Grating[J]. Acta Optica Sinica, 2021, 41(12): 1205001

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Paper Information

Category: Diffraction and Gratings

Received: Dec. 3, 2020

Accepted: Jan. 18, 2021

Published Online: Jun. 2, 2021

The Author Email: Li Jing (lijing2018@ime.ac.cn)

DOI:10.3788/AOS202141.1205001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Structural parameters of phase grating without zero and even order diffraction

Table 1. Structural parameters of phase grating without zero and even order diffraction

Table 2. Diffraction efficiency of phase grating without zero and even order diffraction

Table 2. Diffraction efficiency of phase grating without zero and even order diffraction

Table 3. Structural parameters of IME3

Table 3. Structural parameters of IME3

Table 4. Structural parameters of IME5

Table 4. Structural parameters of IME5

Table 5. Comparison of diffraction efficiency of each structure calculated by using RCWA and scalar diffraction theory%

Table 5. Comparison of diffraction efficiency of each structure calculated by using RCWA and scalar diffraction theory%