Researching | Metal Micro‑Nano Structures by Femtosecond Laser Projection Lithography (Invited)

Chinese Journal of Lasers, Volume. 51, Issue 12, 1202414(2024)

Metal Micro‑Nano Structures by Femtosecond Laser Projection Lithography (Invited)

Heming Wang¹, Chen Xin^1,2, Li Zhang³, Yuhang Xue¹, Dong Wu¹, and Yanlei Hu^1、*

Author Affiliations

¹School of Engineering Science, University of Science and Technology of China, Hefei 230026, Anhui , China

²Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong 999077, China

³Anhui Qingyu Photoelectric Technology Co., Ltd., Hefei 230088, Anhui , China

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References (33)

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References(33)

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Heming Wang, Chen Xin, Li Zhang, Yuhang Xue, Dong Wu, Yanlei Hu. Metal Micro‑Nano Structures by Femtosecond Laser Projection Lithography (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202414

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Feb. 2, 2024

Accepted: Mar. 4, 2024

Published Online: May. 20, 2024

The Author Email: Hu Yanlei (huyl@ustc.edu.cn)

DOI:10.3788/CJL240574

CSTR:32183.14.CJL240574

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology