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Acta Optica Sinica, Volume. 44, Issue 2, 0231001(2024)

Effect of Sample Tilting Angle on the Characterization of Nanofilms by Transmission Electron Microscopy

Ge Zhang1,2, Yun Cui1,2、*, Jiaoling Zhao1,2、**, Tao Wang1,2, and Yuan'an Zhao1,2
Author Affiliations
  • 1Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Figures & Tables(10)
    Schematic diagrams of TEM cross-section sample tilting. (a) Schematic diagram of double tilting holder; (b) orientation diagram of thin film TEM cross-section sample placed in the sample holder

    Fig. 1. Schematic diagrams of TEM cross-section sample tilting. (a) Schematic diagram of double tilting holder; (b) orientation diagram of thin film TEM cross-section sample placed in the sample holder

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    TEM results of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the α direction. (a) TEM images; (b) HRTEM images

    Fig. 2. TEM results of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the α direction. (a) TEM images; (b) HRTEM images

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    Crystallography of [100] single-crystal Si wafer substrate［19］

    Fig. 3. Crystallography of [100] single-crystal Si wafer substrate［19］

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    Schematic diagrams of TEM sample tilting in the α direction. (a) XZ plan; (b) YZ plan

    Fig. 4. Schematic diagrams of TEM sample tilting in the α direction. (a) XZ plan; (b) YZ plan

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    TEM images of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the β direction

    Fig. 5. TEM images of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the β direction

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    Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction

    Fig. 6. Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction

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    Schematic diagram of TEM sample tilting in the β direction

    Fig. 7. Schematic diagram of TEM sample tilting in the β direction

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    Calculation results of relative error δ varies with the tilting angle β. (a) Thin films with Z=50 nm and different t0; (b) thin films with t0=5 nm and different Z

    Fig. 8. Calculation results of relative error δ varies with the tilting angle β. (a) Thin films with Z=50 nm and different t0; (b) thin films with t0=5 nm and different Z

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    • Table 1. Thickness change of the 40-period Mo/Si multilayer film after tilting in the α direction

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      Table 1. Thickness change of the 40-period Mo/Si multilayer film after tilting in the α direction

      Crystal orientationTilt（α，β）Total thickness /nmD /nmdMo /nmdSi /nm
      Non-tilt（0，0）356.87.0434.0963.056
      ［110］（-4.33°，-1.57°）355.77.0474.0542.983
      ［210］（13.99°，-2.47°）356.47.0163.9673.038
      ［310］（22.27°，-3.15°）356.67.0533.9893.063
      ［100］（40.44°，-4.94°）357.07.0534.0822.943

    • Table 2. Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction

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      Table 2. Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction

      Crystal orientationTilt（α，β）

      Total

      thickness /nm

      Non-tilt（0，0）356.8
      ［332］（-1.75°，-21.67°）355.6
      ［111］（-0.06°，-29.81°）346.8
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    Ge Zhang, Yun Cui, Jiaoling Zhao, Tao Wang, Yuan'an Zhao. Effect of Sample Tilting Angle on the Characterization of Nanofilms by Transmission Electron Microscopy[J]. Acta Optica Sinica, 2024, 44(2): 0231001

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    Paper Information

    Category: Thin Films

    Received: Sep. 5, 2023

    Accepted: Nov. 1, 2023

    Published Online: Jan. 11, 2024

    The Author Email: Yun Cui (zhangge1@siom.ac.cn), Jiaoling Zhao (jolin923@siom.ac.cn)

    DOI:10.3788/AOS231519

    CSTR:32393.14.AOS231519

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology