[1] [1] SABELKA R, HARLANDER C, SELBERHERR S. The state of the art in interconnect simulation ［C］ // 2000 International Conference on Simulation of Semiconductor Processes and Devices. Seattle, WA, USA. 2000: 6-11.

[2] [2] NAGARAJ N S, BONIFIELD T, SINGH A, et al. Benchmarks for interconnect parasitic resistance and capacitance ［C］ // International Symposium on Quality Electronic Design. San Jose, CA, USA. 2003: 163-168.

[3] [3] DANG L R, SHIGYO N. Coupling capacitances for two-dimensional wires ［J］. IEEE Electron Device Letters, 1981, 2(8): 196-197.

[4] [4] SEIDL A, KLOSE H, SVOBODA M, et al. CAPCAL-a 3-D capacitance solver for support of CAD systems ［J］. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1988, 7(5): 549-556.

[5] [5] MCFEE S, WU Q, DORICA M, et al. Parallel and distributed processing for H-P adaptive finite-element analysis: a comparison of simulated and empirical studies ［J］. IEEE Transactions on Magnetics, 2004, 40(2): 928- 933.

[6] [6] CARSTEA I T, CARSTEA D P. Parallel computing in finite element applications ［C］ // Proceedings of the 10th WSEAS International Conference on Mathematical and Computational Methods in Science and Engineering. 2008: 180-185.

[7] [7] ZHAI K, YU W. The 2-D boundary element techniques for capacitance extraction of nanometer VLSI interconnects ［J］. International Journal of Numerical Modelling: Electronic Net-works, Devices and Fields, 2014, 27(4): 1-13.

[8] [8] BATTERYWALA S H, DESAI M P. Variance reduction in Monte Carlo capacitance extraction ［C］ // Proceedings of 18th International Conference on VLSI Design Held Jointly with 4th International Conference on Embedded Systems Design. Kolkata, India. 2005: 85-90.

[9] [9] YU W J, ZHUANG H, ZHANG C, et al. RWCap: a floating random walk solver for 3-D capacitance extraction of very-large-scale integration interconnects ［J］. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2013, 32(3): 353-366.

[10] [10] CASTILLO P, PERUGIA I, SHOTZAU D, et al. An a priori error analysis of the local discontinuous Galerkin method for elliptic problems ［J］. SIAM Journal on Numerical Analysis, 2000, 38(5): 1676-1706.

[11] [11] CASTILLO P. A review of the local discontinuous Galerkin (LDG) method applied to elliptic problems ［J］. Applied Numerical Mathematics, 2006, 56(10-11): 1307-1313.