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Acta Optica Sinica, Volume. 35, Issue 6, 612007(2015)

Optimized Analysis of Random Point Array Illumination Source for Nanometer Accuracy Wavefront Error Testing

Lu Zengxiong1,2、*, Qi Yuejing1,2, Qi Wei1,2, Su Jiani1,2, and Peng Zhuojun1,2
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    Article index updated: Mar. 10, 2025

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    Lu Zengxiong, Qi Yuejing, Qi Wei, Su Jiani, Peng Zhuojun. Optimized Analysis of Random Point Array Illumination Source for Nanometer Accuracy Wavefront Error Testing[J]. Acta Optica Sinica, 2015, 35(6): 612007

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 20, 2015

    Accepted: --

    Published Online: May. 28, 2015

    The Author Email: Zengxiong Lu (luzengxiong@aoe.ac.cn)

    DOI:10.3788/aos201535.0612007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology